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Preparation of photoresist-derived carbon micropatterns by proton ion beam lithography and pyrolysis

Carbon Letters
Abbr : Carbon Lett.
2017, 24(1), pp.55-61
Publisher : Korean Carbon Society
Research Area : Other Natural Sciences General

남희균 1 jin-mook jung 2 Hwang In-Tae 3 Shin, Junhwa 4 정창희 5 Choi, Jae-Hak 6

1충남대학교
2충남대학교
3한국원자력연구원
4한국원자력연구원
5한국원자력연구원
6충남대학교

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