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Comparison between the Electrical Properties and Structures after Atmosphere Annealing and Vacuum Annealing of IGZO Thin Films

Industry Promotion Research
Abbr : IPR
2016, 1(1), pp.7-11
Publisher : Industrial Promotion Institute
Research Area : Interdisciplinary Research

Ann, Young Deuk 1 Yeon, Jae Ho 2 Oh teresa 3

1청주대학교
2청주대학교
3청주대학교

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