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Crystallization of amorphous silicon films below 450oC by FALC

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2002, 12(4), pp.210-214
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

Kyoung-WanPark 1 Jeong-EunYou 2 Duck-KyunChoi 3

1Hanyang University
2Hanyang University
3Hanyang University

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