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Heteroepitaxial growth of 3C-SiC on 6H-SiC substrates by thermal chemical vapor deposition

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2003, 13(6), pp.290-296
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

Seong-JooJang 1 Ju-HoonPark 2

1Dongshin University
2Dongshin University

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