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Numerical study of the influence of inlet shape design of a horizontal MOCVD reactor on the characteristics of epitaxial layer growth

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2003, 13(5), pp.247-253
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

Soo-JinJeong 1 So-Jung Kim 2

1Donghae University
2Donghae University



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