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Characterization of via etch by enhanced reactive ion etching

  • Journal of the Korean Crystal Growth and Crystal Technology
  • Abbr : J. Korean Cryst. Growth Cryst. Technol.
  • 2004, 14(6), pp.236-243
  • Publisher : The Korea Association Of Crystal Growth, Inc.
  • Research Area : Materials Science and Engineering

Park Chi Sun 1

1한서대학교

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타입을 선택하세요 :
@article{ART000928627},
author={Park Chi Sun},
title={Characterization of via etch by enhanced reactive ion etching},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2004},
volume={14},
number={6},
pages={236-243}