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pISSN : 1225-1429 / eISSN : 2234-5078

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Impact of gate protection silicon nitride film on the sub-quarter micron transistor performances

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2004, 14(2), pp.47-49
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

최준호 1

1Simon Fraser University

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