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Effects of elastic strain on the agglomeration of silicide films for electrical contacts in integrated circuit applications

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2004, 14(3), pp.95-100
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

최준호 1

1Simon Fraser University

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