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Parametric study of diamond/Ti thin film deposition in microwave plasma CVD

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2005, 15(1), pp.10-15
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

Cho, Hyun 1 Jin-Kon Kim 2

1부산대학교
2부산대학교

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