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The influence of mechanical damage on the formation of the structural defects on the silicon surface during oxidation

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2005, 15(2), pp.45-50
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

KIM YOUNG KWAN 1 Kim Chong Bum 2 김대일 3

1인천대학교
2인천대학교
3인천대학교

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