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Refractive index control of F-doped SiOC : H thin films by addition fluorine

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2007, 17(2), pp.47-51
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

Seok Gyu Yoon 1 Yoon Dae Ho 2 강삼묵 3 정원석 4 박우정 5

1성균관대학교
2성균관대학교
3성균관대학교
4성균관대학교
5성균관대학교

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