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High density plasma etching of single crystalline La3Ga5SiO14 for wide band, high temperature SAWfilter devices

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2005, 15(6), pp.234-238
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

Cho, Hyun 1

1부산대학교

등재

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