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Susceptor design by numerical analysis in horizontal CVD reactor

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2005, 15(4), pp.135-140
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

이정훈 1 류진복 2 배소익 3

1㈜실트론
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3㈜실트론

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