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Effect of defects on lifetime of silicon electrodes and rings in plasma etcher

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2010, 20(2), pp.101-105
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

음정현 1 채정민 2 JaeHwan Pee 3 Sung-Min Lee 4 Kyoon Choi 5 김상진 6 홍태식 7 황충호 8 안학준 9

1요업기술원
2한국세라믹기술원 이천분원
3한국세라믹기술원
4한국세라믹기술원
5한국세라믹기술원
6(주)디에스테크노
7(주)디에스테크노
8(주)디에스테크노
9(주)디에스테크노

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