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Characterizations of TiO2 thin films with atmosphere control of the RF magnetron sputtering

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2011, 21(2), pp.65-69
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

Park Ju-Hoon 1 김봉수 2 김병훈 3

1남부대학교
2(주)한국카본
3과학기술정보연구원

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