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Etch selectivities of mask materials for anisotropic dry etching of gas sensing ZnO and SnO2 films

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2011, 21(4), pp.164-168
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

Jong-Chun Park 1 Cho, Hyun 2

1부산대학교
2부산대학교

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