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Fluorine-based inductively coupled plasma etching of ZnO film

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2011, 21(6), pp.230-234
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

박종천 1 BYEONG WOO LEE 2 KIM BYUNG IK 3 Cho, Hyun 4

1부산대학교
2한국해양대학교
3한국세라믹기술원
4부산대학교

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