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Surface morphology variation during wet etching of GaN epilayer grown by HVPE

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2012, 22(6), pp.261-264
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

오동근 1 Bonggeun Choi 2 방신영 3 강석현 4 김소연 5 김새암 6 이성국 7 정진현 8 김경훈 9 Kwang Bo Shim 10

1한양대학교
2한양대학교
3한양대학교
4한양대학교
5한양대학교
6한양대학교
7유니모포트론
8유니모포트론
9한국세라믹기술원
10한양대학교

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