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Quality evaluation of diamond wire-sawn gallium-doped silicon wafers

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2013, 23(3), pp.119-123
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

Kyoung-Hee Lee 1

1동양미래대학교

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