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Improvement of uniformity in chemical vapor deposition of silicon carbide using CFD

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2014, 24(6), pp.242-245
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

서진원 1 Jun-Woo Kim 2 Yoonsoo Han 3 Kyoon Choi 4 Lee, Jong Heun 5

1한국세라믹기술원
2한국세라믹기술원 이천분원
3한국세라믹기술원
4한국세라믹기술원
5고려대학교

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