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Effect of the additive gas on the bonding structure and mechanical properties of the DLC films deposited by RF-PECVD

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2015, 25(4), pp.145-152
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

Bonggeun Choi 1




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