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Effect of pressure and temperature on bulk micro defect and denuded zone in nitrogen ambient furnace

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2016, 26(3), pp.121-125
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

CHOI,YOUNG-KIU 1 정세영 2 심복철 3

1부산대학교
2LG 실트론
3한양사이버대학교

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