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HVPE growth of Mg-doped AlN epilayers for high-performance power-semi-conductor devices

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2017, 27(6), pp.275-281
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

Sunggeun Bae 1 Jeon Injun 2 Min Yang 3 Sam Nyung Yi 4 Hyung Soo Ahn 5 Jeon Hunsoo 6 KYOUNG HWA KIM 7 Kim Suck Whan 8

1한국해양대학교
2한국해양대학교
3한국해양대학교
4한국해양대학교
5한국해양대학교
6한국해양대학교
7한국해양대학교
8안동대학교

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