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Influence of relative distance between heater and quartz crucible on temperature profile of hot-zone in Czochralski silicon crystal growth

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2018, 28(5), pp.179-184
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

김광훈 1 권세진 2 김일환 3 Junseong Park 4 심태헌 5 Jea Gun Park 6

1웅진에너지 연구소
2웅진에너지 연구소
3한양대학교
4한양대학교
5한양대학교
6한양대학교

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