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Study on residual stress characteristics according to the substrate type and V/III ratio during GaN growth by HVPE

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2020, 30(2), pp.41-46
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

Joo Hyung Lee 1 LEESEUNGHOON 2 Hee Ae Lee 3 Hyo Sang Kang 4 Oh Nuri 5 Sung Yi 6 Seong Kuk Lee 7 Jae Hwa Park 8

1한양대학교
2한양대학교
3한양대학교
4한양대학교
5한양대학교
6한양대학교
7에임즈마이크론(주)
8에임즈마이크론(주)

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