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Comparison of plasma resistance between spray coating films and bulk of CaO-Al2O3-SiO2 glasses under CF4/O2/Ar plasma etching

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2020, 30(2), pp.66-72
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

Hyein Na 1 Jewon Park 2 Jae-hyuk Park 3 Dae-gun Kim 4 Sungchurl Choi 5 Kim Hyeong Jun 6

1한국세라믹기술원
2한국세라믹기술원
3아이원스
4아이원스
5한양대학교
6한국세라믹기술원

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