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A study on the thermal oxidation process of bulk AlN single crystal grown by PVT

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2020, 30(5), pp.168-173
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

Hyo Sang Kang 1 Kang, Seung-Min 2

1한양대학교 신소재공학
2한서대학교

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