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Thermal displacement minimization of an oxide target for bonding process by finite element analysis and optimal design

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2020, 30(5), pp.208-213
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

Hanyoung Cha 1 Chan-Yeup Chung 2

1한국세라믹기술원
2한국세라믹기술원

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