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Growth of Ga2O3 films on 4H-SiC substrates by metal organic chemical vapor deposition and their characteristics depend on crystal phase

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2021, 31(4), pp.149-153
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Materials Science and Engineering

KIM SO YOON 1 이정복 2 Hyung Soo Ahn 3 KYOUNG HWA KIM 4 Min Yang 5

1한국해양대학교
2한국해양대학교
3한국해양대학교
4한국해양대학교 화합물반도체공정교육센터
5한국해양대학교

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