Semiconductor equipment can be divided into pre-process equipment, post-process equipment, and test equipment. Domestic semiconductor equipment companies have used the Visual Studio development environment provided by MS to control such equipment. MFC technology support has been weakened since Microsoft opened the .NET, but as the MFC continues to provide functionality, semiconductor device control systems have been developed in the Visual C ++ / MFC development environment. However, due to the weak MFC technology support and the development of computer hardware technology, the development of new equipment control system in the Visual C # / WinForm (WPF) environment has recently been, and the MFC base is limited to maintenance and function improvement. Meanwhile, major domestic semiconductor equipment producers are expected to increase their investment in the semiconductor equipment industry in the memory sector. In order to cultivate SW development manpower for semiconductor device control, appropriate education tools are required at universities. Therefore, in this study, we developed a low-cost small educational target board and application for interface application that can practice hardware control in Visual Studio C # development environment. The devices and sensors mounted on the target board are 5-switch, 4-LED, 4-RGB LED, 4-FND, variable resistance, illuminance sensor, temperature / humidity sensor, piezo around the ARM® 32-bit Cortex®-M3 CPU. It is a port for controlling stepper motor and servo motor. And the application is a program for driving these parts. Learning about the field of equipment control with the results of this study is expected to be of great help to job seekers who want to enter this field.