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Separation Purification Characteristics of Rinsing Solution in Semiconductor Process usingHigh Performance Polymer Membranes(Ⅱ)

  • Textile Coloration and Finishing
  • Abbr : Text. Color. and Finish.
  • 2005, 17(4), pp.21-26
  • Publisher : The Korean Society Of Dyers And Finishers
  • Research Area : Engineering > Fiber Engineering > Dyeing Engineering

Lee,Jae-Dal 1 홍영기 2 노덕길 3 Kieseo Bae 4

1혜전대학
2건양대학교
3청운대학교
4충남대학교

Accredited

ABSTRACT

combination separation system is composed of three parts, simple microfiltration unit for the pretreatment of real waste IPA, pervaporation unit with plate and frame type module(the effective membrane area 9,040㎠), and simple ultrafiltration unit as a refiner. Ultrafiltration module with hollow fiber membrane(MWCO 10,000) used to purify waste aqueous IPA solution.In addition, the flux of CMPA-K+ composite membrane for waste aqueous IPA solution was very steady-state with long experiment time(30days). And the standard deviation(σ) was 0.152 and then the coefficient of variation(CV%)was 10.82The IPA concentration on the membrane performance using pervaporation module system could be increased from 89.85wt% to more than 99.90wt% in about 8hr at operation temperature of 70℃ using the pervaporation module system.Therefore, a combination separation process system of simple filtration and pervaporation was very effective for the purpose of the IPA purification and reuse from industrial electronic components cleaning process.

Citation status

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