Electric heating performance of carbon thin films prepared from SU-8 photoresist by deep UV exposure and carbonization

Lee Byoung-Min (이병민); Nam Hui-Gyun (남희균); Choi，  Hyeong  Yeol (최형열); Hong， Sung Kwon (홍성권); Jeong Young Gyu (정영규); Choi, Jae-Hak (최재학)

doi:10.1007/s42823-020-00129-x

Electric heating performance of carbon thin films prepared from SU-8 photoresist by deep UV exposure and carbonization

Carbon Letters
Abbr : Carbon Lett.
2020, 30(6), pp.595-601
DOI : 10.1007/s42823-020-00129-x
Publisher : Korean Carbon Society
Research Area : Natural Science > Natural Science General > Other Natural Sciences General
Received : September 3, 2019
Accepted : February 19, 2020
Published : December 1, 2020

Lee Byoung-Min ¹, Nam Hui-Gyun ¹, Choi， Hyeong Yeol ², Hong， Sung Kwon ¹, Jeong Young Gyu ¹, Choi, Jae-Hak ¹

¹충남대학교
²충남대학교 의류학과

Accredited

ABSTRACT

We report the structural characterization and electric heating performance of carbon thin flms (CTFs), which were prepared from negative-type SU-8 photoresist by deep UV exposure and following carbonization. The prepared CTFs were found to have pseudo-graphitic carbon structures containing partially graphite domains in the amorphous carbon matrix. The CTFs showed a very smooth surface morphology with a roughness of 0.42 nm. The 107 nm-thick CTFs exhibited an excellent electric heating performance by attaining a high maximal temperature of 207 °C and a rapid heating rate of 13.2 °C/s at an applied voltage of 30 V. Therefore, the CTFs prepared in this study can be applied as electrode materials for high-performance electric heaters.

KEYWORDS

SU-8 photoresist · Deep UV · Electric heater · Carbonization · Carbon thin flm

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Carbon Letters 2023 KCI Impact Factor : 1.35 KCI-WoS Impact Factor : 6.04

Electric heating performance of carbon thin films prepared from SU-8 photoresist by deep UV exposure and carbonization

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Citation status

This is the result of checking the information with the same ISSN, publication year, volume, and start page between the WoS and the KCI journals. (as of 2024-07-28)

Total Citation Counts(KCI+WOS) (4) This is the number of times that the duplicate count has been removed by comparing the citation list of WoS and KCI.

Scopus Citation Counts (4) This is the result of checking the information with the same ISSN, publication year, volume, and start page between articles in KCI and the SCOPUS journals. (as of 2024-10-01)

* References for papers published after 2023 are currently being built.

Carbon Letters 2023 KCI Impact Factor : 1.35 KCI-WoS Impact Factor : 6.04

Electric heating performance of carbon thin films prepared from SU-8 photoresist by deep UV exposure and carbonization

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KCI Citation Counts (1)

WoS Citation Counts (3) This is the result of checking the information with the same ISSN, publication year, volume, and start page between the WoS and the KCI journals. (as of 2024-07-28)

Total Citation Counts(KCI+WOS) (4) This is the number of times that the duplicate count has been removed by comparing the citation list of WoS and KCI.

Scopus Citation Counts (4) This is the result of checking the information with the same ISSN, publication year, volume, and start page between articles in KCI and the SCOPUS journals. (as of 2024-10-01)

REFERENCES (33) * References for papers published after 2023 are currently being built.

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This is the result of checking the information with the same ISSN, publication year, volume, and start page between the WoS and the KCI journals. (as of 2024-07-28)

* References for papers published after 2023 are currently being built.