Electric heating performance of carbon thin films prepared from SU-8 photoresist by deep UV exposure and carbonization

Lee Byoung-Min (이병민); Nam Hui-Gyun (남희균); Choi，  Hyeong  Yeol (최형열); Hong， Sung Kwon (홍성권); Jeong Young Gyu (정영규); Choi, Jae-Hak (최재학)

doi:10.1007/s42823-020-00129-x

Electric heating performance of carbon thin films prepared from SU-8 photoresist by deep UV exposure and carbonization

Carbon Letters
Abbr : Carbon Lett.
2020, 30(6), pp.595-601
DOI : 10.1007/s42823-020-00129-x
Publisher : Korean Carbon Society
Research Area : Natural Science > Natural Science General > Other Natural Sciences General
Received : September 3, 2019
Accepted : February 19, 2020
Published : December 1, 2020

Lee Byoung-Min ¹, Nam Hui-Gyun ¹, Choi， Hyeong Yeol ², Hong， Sung Kwon ¹, Jeong Young Gyu ¹, Choi, Jae-Hak ¹

¹충남대학교
²충남대학교 의류학과

Accredited

ABSTRACT

We report the structural characterization and electric heating performance of carbon thin flms (CTFs), which were prepared from negative-type SU-8 photoresist by deep UV exposure and following carbonization. The prepared CTFs were found to have pseudo-graphitic carbon structures containing partially graphite domains in the amorphous carbon matrix. The CTFs showed a very smooth surface morphology with a roughness of 0.42 nm. The 107 nm-thick CTFs exhibited an excellent electric heating performance by attaining a high maximal temperature of 207 °C and a rapid heating rate of 13.2 °C/s at an applied voltage of 30 V. Therefore, the CTFs prepared in this study can be applied as electrode materials for high-performance electric heaters.

KEYWORDS

SU-8 photoresist · Deep UV · Electric heater · Carbonization · Carbon thin flm

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[journal] Zheng Z / 2016 / Highly stable and conductive microcapsules for enhancement of Joule heating performance / ACS Nano 10 : 4695~4703

[journal] Li C / 2015 / Flexible graphene electrothermal films made from electrochemically exfoliated graphite / J Mater Sci 51 : 1043~1051

[journal] Rao KD / 2014 / A highly crystalline single Au wire network as a high temperature transparent heater / Nanoscale 6 : 5645~5651

[journal] Li P / 2016 / Flexible transparent heaters based on silver nanotrough meshes / J Alloys Compd 664 : 764~769

[journal] Lee BM / 2018 / Fabrication and electric heating behavior of carbon thin films from water-soluble poly(vinyl alcohol)via simple dry and ambient stabilization and carbonization / App Surf Sci 456 : 561~567

[journal] 정진묵 / 2016 / Facile construction of electrically-conductive carbon patterns from a cheap coal-type pitch and their application to electric heating devices / Journal of Industrial and Engineering Chemistry / 한국공업화학회 39 : 188~193

[journal] Kwon DS / 2019 / Electrothermal application of novolac-derived carbon micropatterns prepared by proton beam lithography and carbonization / Appl Surf Sci 471 : 328~334

[journal] Souri H / 2016 / A facile method for transparent carbon nanosheets heater based on polyimide / RSC Adv 6 : 52509~52517

[journal] Kim D / 2016 / 3D carbon electrode based triboelectric nanogenerator / Adv Mater Technol 1 : 1600160~

[journal] Hong X / 2017 / Microstructuring of carbon/tin quantum dots via a novel photolithography and pyrolysis-reduction process / Nano Res 10 : 3743~3753

[journal] An CH / 2017 / Facile patterning using dry film photo-resists for flexible electronics : Ag nanowire networks and carbon nanotube networks / J Mater Chem C 5 : 4804~4809

[journal] Amato L / 2014 / Pyrolysed 3D-carbon scaffolds induce spontaneous differentiation of human neural stem cells and facilitate real-time dopamine detection / Adv Funct Mater 24 : 7042~7052

[journal] Kostoglou N / 2019 / Arc-produced short-length multi-walled carbon nanotubes as"millstones"for the preparation of graphene-like nanoplatelets / Carbon 146 : 779~784

[journal] Cançado LG / 2006 / General equation for the determination of the crystallite size of La nanographite by Raman spectroscopy / Appl Phys Lett 88 : 163106~

[journal] Hyun G / 2018 / 3D ordered carbon/SnO2 hybrid nanostructures for energy storage applications / Electrochim Acta 288 : 108~114

[journal] Jin WM / 2011 / Supported pyrolysis for lithographically defined 3D carbon microstructures / J Mater Chem 21 : 14456~14460

[journal] Sharma CS / 2010 / Photoresist derived electrospun carbon nanofibers with tunable morphology and surface properties / Ind Eng Chem Res 49 : 2731~2739

[journal] Pan D / 2010 / Observation of pH-, solvent-, spin-, and excitation-dependent blue photoluminescence from carbon nanoparticles / Chem Commun 46 : 3681~3683

[journal] Lee BM / 2019 / Cellulose non-woven fabrics-derived porous carbon films as binder-free electrodes for supercapacitors / Cellulose 26 : 4529~4540

[journal] Lee BM / 2019 / Fabrication of hexagonally-arranged porous carbon films by proton beam irradiation and carbonization / Radiat Phys Chem 163 : 18~21

[journal] Qi Y / 2018 / Switching vertical to horizontal graphene growth using Faraday cage assisted PECVD approach for high-performance transparent heating device / Adv Mater 30 : 1704839~

[journal] De Arco LG / 2010 / Continuous, highly flexible, and transparent graphene films by chemical vapor deposition for organic photovoltaics / ACS Nano 4 : 2865~2873

[journal] Kim AY / 2014 / Double-layer effect on electrothermal properties of transparent heaters / Phys Status Solidi A 211 : 1923~1927

[journal] Novoselov KS / 2004 / Electric field effect in atomically thin carbon films / Science 306 : 666~669

[journal] Kang J / 2011 / High-performance graphene-based transparent flexible heaters / Nano Lett 11 : 5154~5158

[journal] Yan J / 2014 / Multiwalled carbon nanotube/polydimethylsiloxane composite films as high performance flexible electric heating elements / Appl Phys Lett 105 : 051907~

[journal] El-Tantawy F / 2002 / In situ network structure, electrical and thermal properties of conductive epoxy resin–carbon black composites for electrical heater applications / Mater Lett 56 : 112~126

[journal] Wan N / 2013 / Synthesis of graphene–CNT hybrids via joule heating : structural characterization and electrical transport / Carbon 53 : 260~268

[journal] El-Tantawy F / 2003 / A novel way of enhancing the electrical and thermal stability of conductive epoxy resin-carbon black composites via the Joule heating effect for heating-element applications / J Appl Polym Sci 87 : 97~109

[journal] Sui D / 2011 / Flexible and transparent electrothermal film heaters based on graphene materials / Small 7 : 3186~3192

[journal] Li C / 2016 / Flexible graphene electrothermal films made from electrochemically exfoliated graphite / J Mater Sci 51 : 1043~1051

[journal] Kang TJ / 2011 / Thicknessdependent thermal resistance of a transparent glass heater with a single-walled carbon nanotube coating / Carbon 49 : 1087~1093

[journal] Jung D / 2013 / Transparent film heaters using multi-walled carbon nanotube sheets / Sens Actuat A Phys 199 : 176~180

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Carbon Letters 2023 KCI Impact Factor : 1.35 KCI-WoS Impact Factor : 4.82

Electric heating performance of carbon thin films prepared from SU-8 photoresist by deep UV exposure and carbonization

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Citation status

This is the result of checking the information with the same ISSN, publication year, volume, and start page between the WoS and the KCI journals. (as of 2023-07-14)

Total Citation Counts(KCI+WOS) (4) This is the number of times that the duplicate count has been removed by comparing the citation list of WoS and KCI.

Scopus Citation Counts (4) This is the result of checking the information with the same ISSN, publication year, volume, and start page between articles in KCI and the SCOPUS journals. (as of 2024-07-01)

* References for papers published after 2023 are currently being built.

Carbon Letters 2023 KCI Impact Factor : 1.35 KCI-WoS Impact Factor : 4.82

Electric heating performance of carbon thin films prepared from SU-8 photoresist by deep UV exposure and carbonization

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KCI Citation Counts (1)

WoS Citation Counts (3) This is the result of checking the information with the same ISSN, publication year, volume, and start page between the WoS and the KCI journals. (as of 2023-07-14)

Total Citation Counts(KCI+WOS) (4) This is the number of times that the duplicate count has been removed by comparing the citation list of WoS and KCI.

Scopus Citation Counts (4) This is the result of checking the information with the same ISSN, publication year, volume, and start page between articles in KCI and the SCOPUS journals. (as of 2024-07-01)

REFERENCES (33) * References for papers published after 2023 are currently being built.

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This is the result of checking the information with the same ISSN, publication year, volume, and start page between the WoS and the KCI journals. (as of 2023-07-14)

* References for papers published after 2023 are currently being built.