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Electric heating performance of carbon thin films prepared from SU-8 photoresist by deep UV exposure and carbonization

  • Carbon Letters
  • Abbr : Carbon Lett.
  • 2020, 30(6), pp.595-601
  • DOI : 10.1007/s42823-020-00129-x
  • Publisher : Korean Carbon Society
  • Research Area : Natural Science > Natural Science General > Other Natural Sciences General
  • Received : September 3, 2019
  • Accepted : February 19, 2020
  • Published : December 1, 2020

Lee Byoung-Min 1 Nam Hui-Gyun 1 Choi, Hyeong Yeol 2 Hong, Sung Kwon 1 Jeong Young Gyu 1 Choi, Jae-Hak 1

1충남대학교
2충남대학교 의류학과

Accredited

ABSTRACT

We report the structural characterization and electric heating performance of carbon thin flms (CTFs), which were prepared from negative-type SU-8 photoresist by deep UV exposure and following carbonization. The prepared CTFs were found to have pseudo-graphitic carbon structures containing partially graphite domains in the amorphous carbon matrix. The CTFs showed a very smooth surface morphology with a roughness of 0.42 nm. The 107 nm-thick CTFs exhibited an excellent electric heating performance by attaining a high maximal temperature of 207 °C and a rapid heating rate of 13.2 °C/s at an applied voltage of 30 V. Therefore, the CTFs prepared in this study can be applied as electrode materials for high-performance electric heaters.

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