Carbon Letters 2023 KCI Impact Factor : 1.35 KCI-WoS Impact Factor : 6.04
-
pISSN : 1976-4251 / eISSN : 2233-4998
- https://journal.kci.go.kr/carbon
KJCKorea
Journal Central
Study of the methane flow influence in the micro-tribology behavior of DLC coatings deposited by PECVD: a Raman analysis
- Carbon Letters
- Abbr : Carbon Lett.
- 2021, 31(1), pp.47-56
- DOI : 10.1007/s42823-020-00148-8
- Publisher : Korean Carbon Society
- Research Area : Natural Science > Natural Science General > Other Natural Sciences General
- Received : February 5, 2020
- Accepted : April 24, 2020
- Published : February 1, 2021
César Daniel Rivera-Tello 1, Francisco Javier Flores‑Ruiz 1, M. Flores 2, O. Jimenez 2, I. Farías 2, J. Oseguera‑Peña 3
1CUCEI, Universidad de Guadalajara, Blvd.
2University of Guadalajara
3Termoinnova S.A. de C. V. Boulevard Central
Accredited
ABSTRACT
This paper presents a Raman spectroscopy study of the influence of methane flow on the micro-tribological behavior of diamond-like carbon coatings deposited with an industrial plasma-enhanced chemical vapor deposition system. Results have shown a direct relationship between the methane flow and thickness of the coatings. The analysis of the Raman spectra and deposition parameters allowed establishing the influence of H content with the methane flow, the disorder level and estimation of the sp3 fraction on the carbon coatings. The micro-tribology tests showed a strong dependence of the wear resistance and hardness with Raman parameters. The coating deposited at 72-sccm methane flow presented a thickness of 1.7 µm and a sp3 fraction of 0.33. This sp3 fraction gave rise to a hardness of 24 GPa and an excellent wear resistance of 3.3 × 10–6 mm3 N−1 mm−1 for this DLC coating. Wear tests showed a swelling in the wear profiles on this coating, which was associated with the occurrence of a re-hybridization process.
Statistics
-
285 Viewed
-
0 Downloaded
Tools
Issue List
Citation status
This is the result of checking the information with the same ISSN, publication year, volume, and start page between the WoS and the KCI journals. (as of 2024-07-27)
Total Citation Counts(KCI+WOS) (8) This is the number of times that the duplicate count has been removed by comparing the citation list of WoS and KCI.
Scopus Citation Counts (10) This is the result of checking the information with the same ISSN, publication year, volume, and start page between articles in KCI and the SCOPUS journals. (as of 2024-10-01)
* References for papers published after 2023 are currently being built.
[journal]
M. Kalin
/ 2008
/ Review of boundary lubrication mechanisms of DLC coatings used in mechanical applications
/ Meccanica
/ Springer Science and Business Media LLC
43(6)
: 623~637
[journal]
Klaus Bewilogua
/ 2014
/ History of diamond-like carbon films — From first experiments to worldwide applications
/ Surface and Coatings Technology
/ Elsevier BV
242
: 214~225
[journal]
R. Hauert
/ 2004
/ An overview on the tribological behavior of diamond-like carbon in technical and medical applications
/ Tribology International
/ Elsevier BV
37(11-12)
: 991~1003
[journal]
J Robertson
/ 2002
/ Diamond-like amorphous carbon
/ Materials Science and Engineering: R: Reports
/ Elsevier BV
37(4-6)
: 129~281
[journal]
Jing Shi
/ 2018
/ Ultra-low friction mechanism of highly sp3-hybridized amorphous carbon controlled by interfacial molecule adsorption
/ Physical Chemistry Chemical Physics
/ Royal Society of Chemistry (RSC)
20(35)
: 22445~22454
[journal]
W.G. Cui
/ 2010
/ Quantitative measurements of sp3 content in DLC films with Raman spectroscopy
/ Surface and Coatings Technology
/ Elsevier BV
205(7)
: 1995~1999
[journal]
M. Yoshikawa
/ 1995
/ Raman scattering from nanometer‐sized diamond
/ Applied Physics Letters
/ AIP Publishing
67(5)
: 694~696
[journal]
M. A. Tamor
/ 1994
/ Raman ‘‘fingerprinting’’ of amorphous carbon films
/ Journal of Applied Physics
/ AIP Publishing
76(6)
: 3823~3830
[journal]
D. Beeman
/ 1984
/ Modeling studies of amorphous carbon
/ Physical Review B
/ American Physical Society (APS)
30(2)
: 870~875
[journal]
T. S. Santra
/ 2012
/ Influence of flow rate on different properties of diamond-like nanocomposite thin films grown by PECVD
/ AIP Advances
/ AIP Publishing
2(2)
: 022132~10
[journal]
Andrea Carlo Ferrari
/ 2004
/ Raman spectroscopy of amorphous, nanostructured, diamond–like carbon, and nanodiamond
/ Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences
/ The Royal Society
362(1824)
: 2477~2512
[journal]
W. J. Meng
/ 1998
/ Mechanical properties of Ti-containing and W-containing diamond-like carbon coatings
/ Journal of Applied Physics
/ AIP Publishing
84(8)
: 4314~4321
[journal]
Franck Rose
/ 2014
/ Complete characterization by Raman spectroscopy of the structural properties of thin hydrogenated diamond-like carbon films exposed to rapid thermal annealing
/ Journal of Applied Physics
/ AIP Publishing
116(12)
: 123516~
[journal]
Kwang-Ryeol Lee
/ 1994
/ Precursor gas effect on the structure and properties of diamond-like carbon films
/ Diamond and Related Materials
/ Elsevier BV
3(10)
: 1230~1234
[journal]
Alfred Grill
/ 1993
/ Stresses in diamond-like carbon films
/ Diamond and Related Materials
/ Elsevier BV
2(12)
: 1519~1524
[confproc]
Wöckel J
/ 2015
/ Influence of the precursor gas on the process and layer properties of DLC films
/ 22nd international symposium plasma chemistry
: 4~7
[journal]
John Robertson
/ 2011
/ Plasma Deposition of Diamond-Like Carbon
/ Japanese Journal of Applied Physics
/ IOP Publishing
50
: 01AF01~
[journal]
J. Wagner
/ 1986
/ Optical studies of hydrogenated amorphous carbon plasma deposition
/ Applied Physics Letters
/ AIP Publishing
48(2)
: 106~108
[journal]
Ch. Wild
/ 1987
/ Process monitoring of <i>a</i>‐C:H plasma deposition
/ Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
/ American Vacuum Society
5(4)
: 2227~2230
[journal]
Jae Bun Kim
/ 2003
/
Dependence of the physical properties DLC films
/ Journal of the Korean Physical Society
/ 한국물리학회
42(III)
: 956~960
[journal]
D Mariotti
/ 2013
/ Carbon nanotube growth activated by quantum-confined silicon nanocrystals
/ Journal of Physics D: Applied Physics
/ IOP Publishing
46(12)
: 122001~
[journal]
Å. Björkman
/ 1969
/ Thermische Klärschlammbehandlung
/ Schweizerische Zeitschrift für Hydrologie
/ Springer Science and Business Media LLC
31(2)
: 632~645
[journal]
K. W. R. Gilkes
/ 2000
/ Direct quantitative detection of the sp3 bonding in diamond-like carbon films using ultraviolet and visible Raman spectroscopy
/ Journal of Applied Physics
/ AIP Publishing
87(10)
: 7283~7289
[journal]
Hua Pang
/ 2010
/ Characterization of diamond-like carbon films by SEM, XRD and Raman spectroscopy
/ Applied Surface Science
/ Elsevier BV
256(21)
: 6403~6407
[journal]
W.C. Oliver
/ 2004
/ Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology
/ Journal of Materials Research
/ Springer Science and Business Media LLC
19(1)
: 3~20
[journal]
H. Kashani
/ 2000
/ Microstructural and physical properties of titanium nitride coatings produced by CVD process
/ Materials Science and Engineering: A
/ Elsevier BV
286(2)
: 324~330
[journal]
Yan Ying Ong
/ 2006
/ Process Analysis and Optimization on PECVD Amorphous Silicon on Glass Substrate
/ Journal of Physics: Conference Series
/ IOP Publishing
34(1)
: 812~817
[journal]
M. Ali
/ 2011
/ Surface morphology, growth rate and quality of diamond films synthesized in hot filament CVD system under various methane concentrations
/ Applied Surface Science
/ Elsevier BV
257(20)
: 8420~8426
[journal]
Viana GA
/ 2010
/ Diamond-like carbon deposited by plasma technique as a function of methane flow rate
/ Diam Relat Mater
19(7–9)
: 756~759
[book]
Sherman A
/ 1987
/ Chemical vapor deposition for microelectronics, principles, technology and applications
/ Noyes Publications
[journal]
Zeng-Yuan Guo
/ 2003
/ Size effect on microscale single-phase flow and heat transfer
/ International Journal of Heat and Mass Transfer
/ Elsevier BV
46(1)
: 149~159
[book]
Malandrino G
/ 2009
/ Chemical vapour deposition:precursors, processes and applications
/ Royal Society of Chemistry
: 1~2
[journal]
N. Ravi
/ 2007
/ Deposition of diamond-like carbon films on aluminium substrates by RF-PECVD technique: Influence of process parameters
/ Diamond and Related Materials
/ Elsevier BV
16(1)
: 90~97
[journal]
Cedric Pardanaud
/ 2019
/ Investigating the Possible Origin of Raman Bands in Defective sp2/sp3 Carbons below 900 cm−1: Phonon Density of States or Double Resonance Mechanism at Play?
/ C — Journal of Carbon Research
/ MDPI AG
5(4)
: 79~12
[journal]
C. Casiraghi
/ 2005
/ Raman spectroscopy of hydrogenated amorphous carbons
/ Physical Review B
/ American Physical Society (APS)
72(8)
: 1~14
[book]
Klein MV
/ 1975
/ Light scattering in solids, no. topics, vol 8
/ Springer
: 147~
[journal]
John Robertson
/ 1994
/ The deposition mechanism of diamond-like a-C and a-C: H
/ Diamond and Related Materials
/ Elsevier BV
3(4-6)
: 361~368
[journal]
Ali Modabberasl
/ 2015
/ Fabrication of DLC thin films with improved diamond-like carbon character by the application of external magnetic field
/ Carbon
/ Elsevier BV
94
: 485~493
[journal]
César D. Rivera-Tello
/ 2016
/ Mechanical properties and tribological behavior at micro and macro-scale of WC/WCN/W hierarchical multilayer coatings
/ Tribology International
/ Elsevier BV
101
: 194~203
[journal]
C. J. Diliegros-Godines
/ 2015
/ Mechanical and tribological properties of CdO + SnO2 thin films prepared by sol–gel
/ Journal of Sol-Gel Science and Technology
/ Springer Science and Business Media LLC
74(1)
: 114~120
[journal]
Flores-Ruiz FJ et al
/ 2018
/ Micro-tribological performance of fullerene-like carbon and carbon-nitride surfaces
/ Tribol Int
128(January)
: 104~112
[journal]
Tim Kunze
/ 2014
/ Wear, Plasticity, and Rehybridization in Tetrahedral Amorphous Carbon
/ Tribology Letters
/ Springer Science and Business Media LLC
53(1)
: 119~126
[journal]
Qunfeng Zeng
/ 2011
/ Analysis of plastic deformation in diamond like carbon films–steel substrate system with tribological tests
/ Thin Solid Films
/ Elsevier BV
519(10)
: 3203~3212