Carbon Letters 2023 KCI Impact Factor : 1.35 KCI-WoS Impact Factor : 4.82
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pISSN : 1976-4251 / eISSN : 2233-4998
- https://journal.kci.go.kr/carbon
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Study of the methane flow influence in the micro-tribology behavior of DLC coatings deposited by PECVD: a Raman analysis
- Carbon Letters
- Abbr : Carbon Lett.
- 2021, 31(1), pp.47-56
- DOI : 10.1007/s42823-020-00148-8
- Publisher : Korean Carbon Society
- Research Area : Natural Science > Natural Science General > Other Natural Sciences General
- Received : February 5, 2020
- Accepted : April 24, 2020
- Published : February 1, 2021
César Daniel Rivera-Tello 1, Francisco Javier Flores‑Ruiz 1, M. Flores 2, O. Jimenez 2, I. Farías 2, J. Oseguera‑Peña 3
1CUCEI, Universidad de Guadalajara, Blvd.
2University of Guadalajara
3Termoinnova S.A. de C. V. Boulevard Central
Accredited
ABSTRACT
This paper presents a Raman spectroscopy study of the influence of methane flow on the micro-tribological behavior of diamond-like carbon coatings deposited with an industrial plasma-enhanced chemical vapor deposition system. Results have shown a direct relationship between the methane flow and thickness of the coatings. The analysis of the Raman spectra and deposition parameters allowed establishing the influence of H content with the methane flow, the disorder level and estimation of the sp3 fraction on the carbon coatings. The micro-tribology tests showed a strong dependence of the wear resistance and hardness with Raman parameters. The coating deposited at 72-sccm methane flow presented a thickness of 1.7 µm and a sp3 fraction of 0.33. This sp3 fraction gave rise to a hardness of 24 GPa and an excellent wear resistance of 3.3 × 10–6 mm3 N−1 mm−1 for this DLC coating. Wear tests showed a swelling in the wear profiles on this coating, which was associated with the occurrence of a re-hybridization process.
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