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Study of the methane flow influence in the micro-tribology behavior of DLC coatings deposited by PECVD: a Raman analysis

  • Carbon Letters
  • Abbr : Carbon Lett.
  • 2021, 31(1), pp.47-56
  • DOI : 10.1007/s42823-020-00148-8
  • Publisher : Korean Carbon Society
  • Research Area : Natural Science > Natural Science General > Other Natural Sciences General
  • Received : February 5, 2020
  • Accepted : April 24, 2020
  • Published : February 1, 2021

César Daniel Rivera-Tello 1 Francisco Javier Flores‑Ruiz 1 M. Flores 2 O. Jimenez 2 I. Farías 2 J. Oseguera‑Peña 3

1CUCEI, Universidad de Guadalajara, Blvd.
2University of Guadalajara
3Termoinnova S.A. de C. V. Boulevard Central

Accredited

ABSTRACT

This paper presents a Raman spectroscopy study of the influence of methane flow on the micro-tribological behavior of diamond-like carbon coatings deposited with an industrial plasma-enhanced chemical vapor deposition system. Results have shown a direct relationship between the methane flow and thickness of the coatings. The analysis of the Raman spectra and deposition parameters allowed establishing the influence of H content with the methane flow, the disorder level and estimation of the sp3 fraction on the carbon coatings. The micro-tribology tests showed a strong dependence of the wear resistance and hardness with Raman parameters. The coating deposited at 72-sccm methane flow presented a thickness of 1.7 µm and a sp3 fraction of 0.33. This sp3 fraction gave rise to a hardness of 24 GPa and an excellent wear resistance of 3.3 × 10–6 mm3 N−1 mm−1 for this DLC coating. Wear tests showed a swelling in the wear profiles on this coating, which was associated with the occurrence of a re-hybridization process.

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Total Citation Counts(KCI+WOS) (7) This is the number of times that the duplicate count has been removed by comparing the citation list of WoS and KCI.

Scopus Citation Counts (8) This is the result of checking the information with the same ISSN, publication year, volume, and start page between articles in KCI and the SCOPUS journals. (as of 2023-10-01)

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