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Evaluation of the sp3/sp2 ratio of DLC films by RF-PECVD and its quantitative relationship with optical band gap

  • Carbon Letters
  • Abbr : Carbon Lett.
  • 2021, 31(5), pp.929-939
  • DOI : 10.1007/s42823-020-00199-x
  • Publisher : Korean Carbon Society
  • Research Area : Natural Science > Natural Science General > Other Natural Sciences General
  • Received : September 20, 2020
  • Accepted : October 17, 2020
  • Published : October 1, 2021

Sheng Hongxun 1 Xiong Wenwen 1 Zheng Songsheng 1 Chen Chao 1 He Song 1 Cheng Qijin 1

1College of Energy, Xiamen University

Accredited

ABSTRACT

DLC has been attractive as semiconductor materials for solar cell due to its biological friendliness, fexible microstructures, and especially its tunable band gap. In order to fabricate high-efciency multiband gap solar cell, it is important to control the sp3 / sp2 bonds ratio of DLC flm corresponding to optical band gap (Eg). There are many references reporting the relations among the fabrication conditions, Eg, sp3 /sp2 , and ID/IG. However, a more comprehensive database is needed for controllable fabrication. Especially, the quantitative relationship of sp3 /sp2 ratio to Eg of DLC flm by PECVD is unclear. In this paper, 36 sets of DLC flms were fabricated by RF-PECVD. Characterization methods of XPS, Raman spectroscopy, and IR absorption have been used to determine the sp3 /sp2 ratio of DLC flms. UV/visible light absorption method has applied to evaluate Eg. The Eg obtained is in the range 1.45–3.0 eV. Our results agree well with the references. The XPS spectra gives a linear relationship as Eg=− 0.161 (±0.136)+26.095 (±1.704) · {sp3 (XPS)/sp2 }, the Raman spectra shows a linear function that Eg=1.327 (±0.046)+0.428 (±0.036) · (ID/IG), as well as the FTIR analysis demonstrates that Eg=− 0.492 (±0.093)+0.464 (±0.044) · {sp3 (FTIR)/sp2 }.

Citation status

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Total Citation Counts(KCI+WOS) (9) This is the number of times that the duplicate count has been removed by comparing the citation list of WoS and KCI.

Scopus Citation Counts (12) This is the result of checking the information with the same ISSN, publication year, volume, and start page between articles in KCI and the SCOPUS journals. (as of 2023-10-01)

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