Evaluation of the sp3/sp2 ratio of DLC films by RF-PECVD and its quantitative relationship with optical band gap

Sheng Hongxun; Xiong Wenwen; Zheng Songsheng; Chen Chao; He Song; Cheng Qijin

doi:10.1007/s42823-020-00199-x

Evaluation of the sp3/sp2 ratio of DLC films by RF-PECVD and its quantitative relationship with optical band gap

Carbon Letters
Abbr : Carbon Lett.
2021, 31(5), pp.929-939
DOI : 10.1007/s42823-020-00199-x
Publisher : Korean Carbon Society
Research Area : Natural Science > Natural Science General > Other Natural Sciences General
Received : September 20, 2020
Accepted : October 17, 2020
Published : October 1, 2021

Sheng Hongxun ¹, Xiong Wenwen ¹, Zheng Songsheng ¹, Chen Chao ¹, He Song ¹, Cheng Qijin ¹

¹College of Energy, Xiamen University

Accredited

ABSTRACT

DLC has been attractive as semiconductor materials for solar cell due to its biological friendliness, fexible microstructures, and especially its tunable band gap. In order to fabricate high-efciency multiband gap solar cell, it is important to control the sp3 / sp2 bonds ratio of DLC flm corresponding to optical band gap (Eg). There are many references reporting the relations among the fabrication conditions, Eg, sp3 /sp2 , and ID/IG. However, a more comprehensive database is needed for controllable fabrication. Especially, the quantitative relationship of sp3 /sp2 ratio to Eg of DLC flm by PECVD is unclear. In this paper, 36 sets of DLC flms were fabricated by RF-PECVD. Characterization methods of XPS, Raman spectroscopy, and IR absorption have been used to determine the sp3 /sp2 ratio of DLC flms. UV/visible light absorption method has applied to evaluate Eg. The Eg obtained is in the range 1.45–3.0 eV. Our results agree well with the references. The XPS spectra gives a linear relationship as Eg=− 0.161 (±0.136)+26.095 (±1.704) · {sp3 (XPS)/sp2 }, the Raman spectra shows a linear function that Eg=1.327 (±0.046)+0.428 (±0.036) · (ID/IG), as well as the FTIR analysis demonstrates that Eg=− 0.492 (±0.093)+0.464 (±0.044) · {sp3 (FTIR)/sp2 }.

KEYWORDS

Diamond-like-carbon flm · Sp3 /sp2 ratio · Optical band gap · RF-PECVD

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Total Citation Counts(KCI+WOS) (14) This is the number of times that the duplicate count has been removed by comparing the citation list of WoS and KCI.

Scopus Citation Counts (18) This is the result of checking the information with the same ISSN, publication year, volume, and start page between articles in KCI and the SCOPUS journals. (as of 2024-10-01)

* References for papers published after 2023 are currently being built.

[journal] Cui WG / 2010 / Quantitative measurements of sp3 content in DLC films with Raman spectroscopy / Surf Coat Technol 205(7) : 1995~1999

[journal] Seo SC / 1995 / Effect of substrate bias on the properties of diamondlike carbon films deposited using unbalanced magnetron sputtering / J Vac Sci Technol A Vacu Surf Films 13(6) : 2856~2862

[confproc] Zhang M / 2008 / Research of a diamond-like carbon (DLC) films: promising candidate for absorber layer of solar cells / 6th International conference on thin film physics and applications

[journal] Piazza F / 2005 / Protective diamond-like carbon coatings for future optical storage disks / Diam Relat Mater 14(3–7) : 994~999

[journal] Huang L / 2018 / Microstructure, tribological and cutting performance of Ti-DLC/α-C : H multilayer film on cemented carbide / Surf Coat Technol 353 : 163~170

[journal] Jaoul C / 2009 / Raman analysis of DLC coated engine components with complex shape : understanding wear mechanisms / Thin Solid Films 518(5) : 1475~1479

[journal] Grill A / 2003 / Diamond-like carbon coatings as biocompatible materials—an overview / Diam Relat Mater 12(2) : 166~170

[journal] Kim JI / 2009 / Diamond-like carbon(DLC)microelectrode for electrochemical ELISA / Biosens Bioelectron 24(5) : 1394~1398

[journal] Silva SRP / 2005 / Electron field emission from carbon-based materials / Thin Solid Films 482(1–2) : 79~78

[journal] Varade AKA / 2017 / Synthesis of high hardness IR optical coating using diamond-like carbon by PECVD at room temperature / Diam Relat Mater 78 : 39~43

[journal] Choi WS / 2008 / Diamond-like carbon protective anti-reflection coating for Si solar cell / Mater Lett 62(4–5) : 577~558

[journal] Hofsfiss H / 1993 / Doping and growth of diamond-like carbon films by ion beam deposition / Diam Relat Mater 3 : 137~142

[journal] Mōri T / 1983 / Hard diamondlike carbon films deposited by ionized deposition of methane gas / J Vac Sci Technol A Vac Surf Films 1(1) : 23~27

[journal] Voevodin AA / 1996 / Preparation of amorphous diamond-like carbon by pulsed laser deposition : a critical review / Surf Coat Technol 82 : 199~213

[journal] Clarke GA / 1993 / Characterization of magnetronsputtered diamond-like thin films for optical coatings in IR / Thin Solid Films 236 : 67~71

[journal] Hao T / 2006 / Nano-crystalline diamond films synthesized at low temperature and low pressure by hot filament chemical vapor deposition / Surf Coat Technol 201(3–4) : 801~880

[journal] L. Yin / 2017 / The Barrier Properties of PET Coated DLC Film Deposited by Microwave Surface-Wave PECVD / IOP Conference Series: Materials Science and Engineering 274

[journal] Vaghri E / 2011 / Characterization of Diamond : Like Carbon Films Synthesized by DC-Plasma Enhanced Chemical Vapor Deposition / J Fusion Energy 30(5) : 447~452

[journal] Michler T / 1998 / DLC Films deposited by bipolar pulsed DC PACVD / Diam Relat Mater 7 : 459~462

[journal] Ravi N / 2007 / Deposition of diamond-like carbon films on aluminium substrates by RF-PECVD technique : Influence of process parameters / Diam Relat Mater 16(1) : 90~97

[journal] Ţălu Ş / 2019 / The effects of deposition time on the nanoscale patterns of Ag/DLC nanocomposite synthesized by RF-PECVD / Microsc Res Tech 82(5) : 572~579

[journal] Tang JL / 2013 / Study on Deposition of Amorphous DLC-Si Films by RF-PECVD / Key Eng Mater 552 : 244~247

[journal] Tsai HC / 1988 / Structure and properties of sputtered carbon overcoats on rigid magnetic media disks / J Vac Sci Technol A Vac Surf Films 6(4) : 2307~2315

[journal] Samano EC / 2002 / DLC thin films characterized by AES, XPS and EELS / Appl Surf Sci 202 : 1~7

[journal] Shindo D / 2005 / Characterization of DLC films by EELS and electron holography / J Electron Microsc 54(1) : 11~17

[journal] Sikora A / 2010 / Structure of diamondlike carbon films deposited by femtosecond and nanosecond pulsed laser ablation / J Appl Phys 108(11) : 113516~

[journal] Tamor MA / 1991 / Atomic constraint in hydrogenated ‘"diamond-like"’ carbon / Appl Phys Lett 58(6) : 592~594

[journal] Atchison F / 2007 / Structural characterization of diamond-like carbon films for ultracold neutron applications / Diam Relat Mater 16(2) : 334~341

[journal] Umeno M / 2005 / Diamond-like carbon thin films by microwave surface-wave plasma CVD aimed for the application of photovoltaic solar cells / Diam Relat Mater 14(11–12) : 1973~1197

[journal] Noda M / 2008 / Microstructure and optical band gap control of DLC film deposited by pulsed discharge plasma CVD / Diam Relat Mater 17(4–5) : 646~664

[journal] Pandey M / 2004 / Diamond-like carbon coatings : AFM and ellipsometric studies / Surf Coat Technol 182(1) : 24~34

[journal] Rusop M / 2005 / Characteristics of phosphorus-doped amorphous carbon films grown by r. f. plasmaenhanced cvd with a novel phosphorus solid target / Surf Rev Lett 12(1) : 19~25

[journal] Tsuchiya M / 2016 / Structural and electrical properties and current–voltage characteristics of nitrogen-doped diamond-like carbon films on Si substrates by plasma-enhanced chemical vapor deposition / Jpn J Appl Phys 55(6) : 065502~

[journal] Dey R / 2018 / Phosphorus doping of diamond-like carbon films by radio frequency CVDcum-evaporation technique / Diam Relat Mater 82 : 70~78

[journal] Amaratunga GAJ / 1991 / Amorphous diamond-Si semiconductor heterojunctions / Appl Phys Lett 59(1) : 69~71

[thesis] Xiang C / 2004 / Study on the photoelectric properties of diamondlike carbon films and MSM photoelectric devices / PhD / Xiamen University

[journal] Ferrari AC / 2004 / Raman spectroscopy of amorphous, nanostructured, diamond-like carbon, and nanodiamond / Philos Trans A Math Phys Eng Sci 362(1824) : 2477~2512

[journal] Ravagnan L / 2006 / Quantitative evaluation of sp/sp2 hybridization ratio in cluster-assembled carbon films by in situ near edge X-ray absorption fine structure spectroscopy / Carbon 44(8) : 1518~1524

[journal] Varade A / 2014 / Diamond-like carbon coating made by RF plasma enhanced chemical vapour deposition for protective antireflective coatings on Germanium / Proc Mater Sci 5 : 1015~1019

[journal] Eskusson J / 2008 / Synthesis of DLC films by PLD from liquid target and dependence of film properties on the synthesis conditions / Appl Phys A 93 : 745~749

[journal] Tauc J / 1966 / Optical properties and electronic structure of amorphous Germanium / Phys Status Solid 15 : 627~637

[journal] Merel P / 1998 / Direct evaluation of the sp3 content in diamond-like-carbon films by XPS / Appl Surf Sci 136 : 105~110

[journal] Park CK / 2002 / XPS and XRR studies on microstructures and interfaces of DLC films deposited by FCVA method / Thin Solid Films 420 : 235~240

[journal] Fourches N / 1994 / Plasma deposition of hydrogenated amorphous carbon : growth rates, properties and structures / Thin Solid Films 240(1–2) : 28~23

[journal] Al-Riyami S / 2011 / Fourier transform infrared spectroscopic study of nitrogen-doped ultrananocrystalline diamond/hydrogenated amorphous carbon composite films prepared by pulsed laser deposition / Diam Relat Mater 20(7) : 1072~1075

[journal] J. L. Andújar / 2003 / / Diamond and Related Materials 12(2) : 98~104

[journal] Ferrari AC / 2007 / Raman spectroscopy of graphene and graphite : disorder, electron–phonon coupling, doping and nonadiabatic effects / Solid State Commun 143(1–2) : 47~45

[journal] J. L. Andújar / 2003 / / Diamond and Related Materials 12(2) : 98~104

[journal] Wang H / 2000 / He-Sun Zhu, M Iida, Amorphous carbon and carbon nitride films synthesized by electrolysis of nitrogen-containing liquid / Diamond Relat Mater 9 : 1307~1311

[journal] Dischler B / 1983 / Bonding in hydrogenated hard carbon studied by optical spectroscopy / Solid State Commun 48(2) : 105~108

[journal] Patil DS / 1998 / Microwave plasma chemical vapour deposition of diamond like carbon thin films / J Alloy Compd 278 : 130~134

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Carbon Letters 2023 KCI Impact Factor : 1.35 KCI-WoS Impact Factor : 6.04

Evaluation of the sp3/sp2 ratio of DLC films by RF-PECVD and its quantitative relationship with optical band gap

ABSTRACT

KEYWORDS

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This is the result of checking the information with the same ISSN, publication year, volume, and start page between the WoS and the KCI journals. (as of 2024-07-27)

Total Citation Counts(KCI+WOS) (14) This is the number of times that the duplicate count has been removed by comparing the citation list of WoS and KCI.

Scopus Citation Counts (18) This is the result of checking the information with the same ISSN, publication year, volume, and start page between articles in KCI and the SCOPUS journals. (as of 2024-10-01)

* References for papers published after 2023 are currently being built.

Carbon Letters 2023 KCI Impact Factor : 1.35 KCI-WoS Impact Factor : 6.04

Evaluation of the sp3/sp2 ratio of DLC films by RF-PECVD and its quantitative relationship with optical band gap

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WoS Citation Counts (14) This is the result of checking the information with the same ISSN, publication year, volume, and start page between the WoS and the KCI journals. (as of 2024-07-27)

Total Citation Counts(KCI+WOS) (14) This is the number of times that the duplicate count has been removed by comparing the citation list of WoS and KCI.

Scopus Citation Counts (18) This is the result of checking the information with the same ISSN, publication year, volume, and start page between articles in KCI and the SCOPUS journals. (as of 2024-10-01)

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