@article{ART002963470},
author={Gruenwald J. and Eichenhofer G. and Filipič G. and Federl Ž. and Feuchtenberger W. and Panos K. and Rodríguez G. Hernández and Coclite A. M.},
title={Inverted fireball deposition of carbon films with extremely low surface roughness},
journal={Carbon Letters},
issn={1976-4251},
year={2023},
volume={33},
number={1},
pages={225-231},
doi={10.1007/s42823-022-00424-9}
TY - JOUR
AU - Gruenwald J.
AU - Eichenhofer G.
AU - Filipič G.
AU - Federl Ž.
AU - Feuchtenberger W.
AU - Panos K.
AU - Rodríguez G. Hernández
AU - Coclite A. M.
TI - Inverted fireball deposition of carbon films with extremely low surface roughness
JO - Carbon Letters
PY - 2023
VL - 33
IS - 1
PB - Korean Carbon Society
SP - 225
EP - 231
SN - 1976-4251
AB - The surface of carbon films deposited with inverted plasma fireballs is analysed in this paper. Measurements were conducted with Raman spectroscopy, atomic force microscopy and nanoindentation. The latter was used to obtain Young’s modulus as well as Martens and Vickers hardness. The roughness of the film was measured by atomic force microscopy and its thickness was measured. It was shown with Raman spectroscopy that the films are homogeneous in terms of atomic composition and layer thickness over an area of about 125 × 125 mm. Furthermore, it was demonstrated that inverted plasma fireballs are a viable tool for obtaining homogeneous, large area carbon films with rapid growth and very little energy consumption. The obtained films show very low roughness.
KW - PECVD Carbon Inverted fireballs Deposition
DO - 10.1007/s42823-022-00424-9
ER -
Gruenwald J., Eichenhofer G., Filipič G., Federl Ž., Feuchtenberger W., Panos K., Rodríguez G. Hernández and Coclite A. M.. (2023). Inverted fireball deposition of carbon films with extremely low surface roughness. Carbon Letters, 33(1), 225-231.
Gruenwald J., Eichenhofer G., Filipič G., Federl Ž., Feuchtenberger W., Panos K., Rodríguez G. Hernández and Coclite A. M.. 2023, "Inverted fireball deposition of carbon films with extremely low surface roughness", Carbon Letters, vol.33, no.1 pp.225-231. Available from: doi:10.1007/s42823-022-00424-9
Gruenwald J., Eichenhofer G., Filipič G., Federl Ž., Feuchtenberger W., Panos K., Rodríguez G. Hernández, Coclite A. M. "Inverted fireball deposition of carbon films with extremely low surface roughness" Carbon Letters 33.1 pp.225-231 (2023) : 225.
Gruenwald J., Eichenhofer G., Filipič G., Federl Ž., Feuchtenberger W., Panos K., Rodríguez G. Hernández, Coclite A. M.. Inverted fireball deposition of carbon films with extremely low surface roughness. 2023; 33(1), 225-231. Available from: doi:10.1007/s42823-022-00424-9
Gruenwald J., Eichenhofer G., Filipič G., Federl Ž., Feuchtenberger W., Panos K., Rodríguez G. Hernández and Coclite A. M.. "Inverted fireball deposition of carbon films with extremely low surface roughness" Carbon Letters 33, no.1 (2023) : 225-231.doi: 10.1007/s42823-022-00424-9
Gruenwald J.; Eichenhofer G.; Filipič G.; Federl Ž.; Feuchtenberger W.; Panos K.; Rodríguez G. Hernández; Coclite A. M.. Inverted fireball deposition of carbon films with extremely low surface roughness. Carbon Letters, 33(1), 225-231. doi: 10.1007/s42823-022-00424-9
Gruenwald J.; Eichenhofer G.; Filipič G.; Federl Ž.; Feuchtenberger W.; Panos K.; Rodríguez G. Hernández; Coclite A. M.. Inverted fireball deposition of carbon films with extremely low surface roughness. Carbon Letters. 2023; 33(1) 225-231. doi: 10.1007/s42823-022-00424-9
Gruenwald J., Eichenhofer G., Filipič G., Federl Ž., Feuchtenberger W., Panos K., Rodríguez G. Hernández, Coclite A. M.. Inverted fireball deposition of carbon films with extremely low surface roughness. 2023; 33(1), 225-231. Available from: doi:10.1007/s42823-022-00424-9
Gruenwald J., Eichenhofer G., Filipič G., Federl Ž., Feuchtenberger W., Panos K., Rodríguez G. Hernández and Coclite A. M.. "Inverted fireball deposition of carbon films with extremely low surface roughness" Carbon Letters 33, no.1 (2023) : 225-231.doi: 10.1007/s42823-022-00424-9
