@article{ART000979601},
author={Kang, Seung-Min},
title={Growth of p-ZnO by RF-DC magnetron co-sputtering},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2004},
volume={14},
number={6},
pages={277-280}
TY - JOUR
AU - Kang, Seung-Min
TI - Growth of p-ZnO by RF-DC magnetron co-sputtering
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2004
VL - 14
IS - 6
PB - The Korea Association Of Crystal Growth, Inc.
SP - 277
EP - 280
SN - 1225-1429
AB - p-ZnO films have been grown on (0001)sapphire substrates by RF-DC magnetron co-sputtering. The p-ZnO single crystalline thin films of the thickness about 120 nm were grown successfully. The dopant (Aluminum) was sputtered simultaneously from Al metal target by DC sputtering during rf-magnetron sputtering of ZnO at the substrate temperatures of 400oC and 600oC respectively. The crystallinity and optical properties of as-grown P-ZnO films have been characterized.
KW - p-ZnO;Epitaxial films;RF-DC magnetron co-sputtering
DO -
UR -
ER -
Kang, Seung-Min. (2004). Growth of p-ZnO by RF-DC magnetron co-sputtering. Journal of the Korean Crystal Growth and Crystal Technology, 14(6), 277-280.
Kang, Seung-Min. 2004, "Growth of p-ZnO by RF-DC magnetron co-sputtering", Journal of the Korean Crystal Growth and Crystal Technology, vol.14, no.6 pp.277-280.
Kang, Seung-Min "Growth of p-ZnO by RF-DC magnetron co-sputtering" Journal of the Korean Crystal Growth and Crystal Technology 14.6 pp.277-280 (2004) : 277.
Kang, Seung-Min. Growth of p-ZnO by RF-DC magnetron co-sputtering. 2004; 14(6), 277-280.
Kang, Seung-Min. "Growth of p-ZnO by RF-DC magnetron co-sputtering" Journal of the Korean Crystal Growth and Crystal Technology 14, no.6 (2004) : 277-280.
Kang, Seung-Min. Growth of p-ZnO by RF-DC magnetron co-sputtering. Journal of the Korean Crystal Growth and Crystal Technology, 14(6), 277-280.
Kang, Seung-Min. Growth of p-ZnO by RF-DC magnetron co-sputtering. Journal of the Korean Crystal Growth and Crystal Technology. 2004; 14(6) 277-280.
Kang, Seung-Min. Growth of p-ZnO by RF-DC magnetron co-sputtering. 2004; 14(6), 277-280.
Kang, Seung-Min. "Growth of p-ZnO by RF-DC magnetron co-sputtering" Journal of the Korean Crystal Growth and Crystal Technology 14, no.6 (2004) : 277-280.
