@article{ART001113014},
author={Jwayeon Kim and JaeKeun Yu and Sul Yong Tae},
title={Structural characterization of Al2O3 layer coated with plasma sprayed method},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2006},
volume={16},
number={3},
pages={116-120}
TY - JOUR
AU - Jwayeon Kim
AU - JaeKeun Yu
AU - Sul Yong Tae
TI - Structural characterization of Al2O3 layer coated with plasma sprayed method
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2006
VL - 16
IS - 3
PB - The Korea Association Of Crystal Growth, Inc.
SP - 116
EP - 120
SN - 1225-1429
AB - We have investigated plasma spray coated Al2O3 layers on Al-60 series substrates for development of wafer electrostatic chuck in semiconductor dry etching system. Samples were prepared without/with cooling bar on backside of samples, at various distances, and with different powder feed rates. There were many cracks and pores in the Al2O3 layers coated on Al-60 series substrates without cooling bar on the backside of samples. But the cracks and pores were almost disappeared in the Al2O3 layers on Al-60 series substrates coated with cooling bar on the back side of samples, 15 g/min. powder feed rate and various 60, 70, 80 mm working distances. Then the surface morphology was not changed with various working distances of 60, 70, 80 mm. When the powder feed rate was changed from 15 g/min to 20 g/min, the crack did not appear, but few pores appeared. Also the Al2O3 layer was coated with many small splats compared with Al2O3 layer coated with 15 g/min powder feed rate. The deposited rate of Al2O3 layer was higher when the process was done without cooling bar on the back side of sample than that with cooling bar on the back side of sample.
KW - Plasma spray;Al2O3;Electro-static chuck;PECVD;Dryetch
DO -
UR -
ER -
Jwayeon Kim, JaeKeun Yu and Sul Yong Tae. (2006). Structural characterization of Al2O3 layer coated with plasma sprayed method. Journal of the Korean Crystal Growth and Crystal Technology, 16(3), 116-120.
Jwayeon Kim, JaeKeun Yu and Sul Yong Tae. 2006, "Structural characterization of Al2O3 layer coated with plasma sprayed method", Journal of the Korean Crystal Growth and Crystal Technology, vol.16, no.3 pp.116-120.
Jwayeon Kim, JaeKeun Yu, Sul Yong Tae "Structural characterization of Al2O3 layer coated with plasma sprayed method" Journal of the Korean Crystal Growth and Crystal Technology 16.3 pp.116-120 (2006) : 116.
Jwayeon Kim, JaeKeun Yu, Sul Yong Tae. Structural characterization of Al2O3 layer coated with plasma sprayed method. 2006; 16(3), 116-120.
Jwayeon Kim, JaeKeun Yu and Sul Yong Tae. "Structural characterization of Al2O3 layer coated with plasma sprayed method" Journal of the Korean Crystal Growth and Crystal Technology 16, no.3 (2006) : 116-120.
Jwayeon Kim; JaeKeun Yu; Sul Yong Tae. Structural characterization of Al2O3 layer coated with plasma sprayed method. Journal of the Korean Crystal Growth and Crystal Technology, 16(3), 116-120.
Jwayeon Kim; JaeKeun Yu; Sul Yong Tae. Structural characterization of Al2O3 layer coated with plasma sprayed method. Journal of the Korean Crystal Growth and Crystal Technology. 2006; 16(3) 116-120.
Jwayeon Kim, JaeKeun Yu, Sul Yong Tae. Structural characterization of Al2O3 layer coated with plasma sprayed method. 2006; 16(3), 116-120.
Jwayeon Kim, JaeKeun Yu and Sul Yong Tae. "Structural characterization of Al2O3 layer coated with plasma sprayed method" Journal of the Korean Crystal Growth and Crystal Technology 16, no.3 (2006) : 116-120.
