Structural properties of Pd-barium zirconate dense membrane synthesized by dual sputtering method (동시 증착 스퍼터링 공정에 의해 증착된 Pd-barium zirconate membrane의 구조분석)

변명섭; Eun-Tae Kang (강은태); 조우석; 김진호; Kwangtaek Hwang (황광택)

Structural properties of Pd-barium zirconate dense membrane synthesized by dual sputtering method

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2012, 22(1), pp.19~24
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Engineering > Materials Science and Engineering

변명섭 ¹, Eun-Tae Kang ¹, 조우석 ², 김진호 ², Kwangtaek Hwang ²

¹경상대학교
²한국세라믹기술원

Accredited

ABSTRACT

Barium zirconate exhibits good thermo-chemical stability and proton conduction at high temperatures, but shows poor electron conductivity. Therefore, for high efficiency of hydrogen separation, a very thin and dense Pd-Barium zirconate membrane has to be coated on a porous substrate. A thin and dense Pd-Barium zirconate membrane was successfully synthesized on a porous substrate by means of dual sputtering method. The structural and chemical features of the BaZr0.85Y0.15O3 − δ membranes sputtered at 300oC and 400oC were investigated by X-ray diffractometry, and it was found that a well-crystallized membrane, Pm-3m space group of BaZrO3, was synthesized. The surface and cross-sectional morphologies of membrane were assessed by SEM (scanning electron microscopy) and TEM(transmission electron microscopy) of the surface and of cross sections. The cross sectional observation of Pd-BaZr0.85Y0.15O3 − δ membrane by dual sputtering shows that the coating is quite dense with columnar structure.

KEYWORDS

Barium zirconate, Hydrogen separation, Membranes, Dual sputtering method

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[journal] H. Iwahara / 1995 / Technological challenges in the application of proton conducting ceramics / Solid State Ionics 77 : 289~

[journal] W.G. Coors / 2003 / Protonic ceramic fuel cells for high-efficiency operation with methane / J. Pow. Sour 118 : 150~

[journal] G. Zhang / 2003 / Interfacial resistances of Ni-BCY mixed-conducting membranes for hydrogen separation / Solid State Ionics 159 : 121~

[journal] Z. Zhong / 2007 / Stability and conductivity study of the BaCe0.9 −. XZrXY0.1O2.95 systems / Solid State Ionics 178 : 213~

[journal] F. Iguchi / 2007 / Microstructures and grain boundary conductivity of BaZr1 −. XYXO3 (X = 0.05, 0.10, 0.15) ceramics / Solid State Ionics 178(7) : 691~

[journal] K. Katahira / 2000 / Protonic conduction in Zr-substituted BaCeO3 / Solid State Ionics 138(1) : 91~

[journal] 김대희 / 2009 / Transfer of Oxygen Vacancy and Proton in Y-doped BaZrO3 / 한국세라믹학회지 / 한국세라믹학회 46(6) : 695~699

[journal] K.D. Kreuer / 2003 / Proton-conducting oxides / Annu. Rev. Mater. Res 33 : 333~

[journal] M.A.P. Yazdi / 2009 / Electrical and structural investigations of perovskite structure reactively sputter deposited coatings / Solid State Ionics 180 : 1246~

[journal] H. Limage / 2011 / Study of the effect of a silver nanoparticle seeding layer on the crystallisation temperature, photoinduced hydrophylic and catalytic properties of TiO2 thin films deposited on glass by magnetron sputtering / Surf. Coat. Tech 205(13) : 3774~

[journal] R. Thomas / 2002 / Effect of substrate temperature on the crystallization of Pb(Zr,Ti)O3 films on Pt/Ti/Si substrates prepared by radio frequency magnetron sputtering with a stoichiometric oxide target / Mat. Sci. Eng., B 95(1) : 36~

[journal] I. Levin / 2003 / Phase equilibria, crystal structures, and dielectric anomaly in the BaZrO3-CaZrO3 system / J. Solid State Chem 175(2) : 170~

[journal] Y. Kuru / 2008 / Coefficients of thermal expansion of thin metal films investigated by non-ambient X-ray diffraction stress analysis / Surf. Coat. Tech 202 : 2306~

[journal] W. Chen / 2010 / On the assembling of Pd/ceramic composite membranes for hydrogen separation / Sep. Puri. Tech 72 : 92~

[journal] 김성현 / 200806 / Formation of a defect-free Pd-Cu-Ni ternary alloy membrane on a polished porous nickel support (PNS) / JOURNAL OF MEMBRANE SCIENCE / ELSEVIER SCIENCE BV 318(1) : 346~354

[journal] J. O’'Brien / 2001 / Pd/Ag membranes on porous alumina substrates by unbalanced magnetron sputtering / Surf. Coat. Tech 142 : 253~

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