@article{ART002217561},
author={Kang, Seung-Min},
title={A study on the heat treatment process for AlN single crystals grown by PVT method},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2017},
volume={27},
number={2},
pages={65-69},
doi={10.6111/JKCGCT.2017.27.2.065}
TY - JOUR
AU - Kang, Seung-Min
TI - A study on the heat treatment process for AlN single crystals grown by PVT method
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2017
VL - 27
IS - 2
PB - The Korea Association Of Crystal Growth, Inc.
SP - 65
EP - 69
SN - 1225-1429
AB - AlN single crystal was thermally treated at 1600, 1700 and 1800oC in the ambient pressure of under 100 torr.
AlN single crystal was obtained by PVT (Physial Vapor Transport) method using by a facility having a growth part which was heated by RF (Radio Frequency) induction heating. The single crystal specimens surface was evaluated by optical microscope and it was recognized that their morphology was varied with the heat treatment temperature and a set ambient pressure. In this report, the optical microscopic results were reported. According to the increase of temperature the crystal surface was etched thermally. It was evaluated by appearance of small pits on the crystal surface.
KW - AlN;Single crystals;Heat treatment;Pits;PVT growth
DO - 10.6111/JKCGCT.2017.27.2.065
ER -
Kang, Seung-Min. (2017). A study on the heat treatment process for AlN single crystals grown by PVT method. Journal of the Korean Crystal Growth and Crystal Technology, 27(2), 65-69.
Kang, Seung-Min. 2017, "A study on the heat treatment process for AlN single crystals grown by PVT method", Journal of the Korean Crystal Growth and Crystal Technology, vol.27, no.2 pp.65-69. Available from: doi:10.6111/JKCGCT.2017.27.2.065
Kang, Seung-Min "A study on the heat treatment process for AlN single crystals grown by PVT method" Journal of the Korean Crystal Growth and Crystal Technology 27.2 pp.65-69 (2017) : 65.
Kang, Seung-Min. A study on the heat treatment process for AlN single crystals grown by PVT method. 2017; 27(2), 65-69. Available from: doi:10.6111/JKCGCT.2017.27.2.065
Kang, Seung-Min. "A study on the heat treatment process for AlN single crystals grown by PVT method" Journal of the Korean Crystal Growth and Crystal Technology 27, no.2 (2017) : 65-69.doi: 10.6111/JKCGCT.2017.27.2.065
Kang, Seung-Min. A study on the heat treatment process for AlN single crystals grown by PVT method. Journal of the Korean Crystal Growth and Crystal Technology, 27(2), 65-69. doi: 10.6111/JKCGCT.2017.27.2.065
Kang, Seung-Min. A study on the heat treatment process for AlN single crystals grown by PVT method. Journal of the Korean Crystal Growth and Crystal Technology. 2017; 27(2) 65-69. doi: 10.6111/JKCGCT.2017.27.2.065
Kang, Seung-Min. A study on the heat treatment process for AlN single crystals grown by PVT method. 2017; 27(2), 65-69. Available from: doi:10.6111/JKCGCT.2017.27.2.065
Kang, Seung-Min. "A study on the heat treatment process for AlN single crystals grown by PVT method" Journal of the Korean Crystal Growth and Crystal Technology 27, no.2 (2017) : 65-69.doi: 10.6111/JKCGCT.2017.27.2.065
