Fabrication of porous titanium oxide-manganese oxide ceramics with enhanced anti-static and mechanical properties (우수한 대전방지 및 기계적 성질을 가지는 다공성 산화티탄-산화망간 세라믹스 제조)

YOUDONGSU (유동수); Kwangtaek Hwang (황광택); Jong-Young Kim (김종영); 정종열; Seungwoo BAIK (백승우); Wooyoung Shim (심우영)

doi:10.6111/JKCGCT.2018.28.6.263

Fabrication of porous titanium oxide-manganese oxide ceramics with enhanced anti-static and mechanical properties

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2018, 28(6), pp.263~270
DOI : 10.6111/JKCGCT.2018.28.6.263
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Engineering > Materials Science and Engineering
Published : December 31, 2018

YOUDONGSU ¹, Kwangtaek Hwang ¹, Jong-Young Kim ¹, 정종열 ¹, Seungwoo BAIK ², Wooyoung Shim ³

¹한국세라믹기술원
²(주)맥테크
³연세대학교

Accredited

ABSTRACT

Recently, porous ceramic materials with anti-static performance are urgently needed for semiconductor and OLED/LCD display manufacturing industry. In this work, we fabricated porous titanium manganese oxide ceramics having the surface resistivity of 10 8 -10 10 ohm and enhanced mechanical strength by partial sintering method using nanosized titanium oxide. By addition of nano-sized titanium oxide in the matrix, neck formation between grains was strengthened, which remarkably increased flexural strength up to 170 MPa (@porosity: 15 %), 110 MPa (@porosity: 31 %), compared to 80 MPa (@porosity: 26 %) for pristine titanium manganese oxide ceramics. We evaluated the performances of our ceramics as air-floating module for OLED flexible display manufacturing devices.

KEYWORDS

Porous ceramic, Titanium oxide, Manganese oxide, Anti-static, Flexural strength, Air-floating

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