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@article{ART002537794},
author={SHIN Yunji and park tae yong and Si-Young Bae and Seongmin Jeong},
title={The effect of rotation on the macro-steps formation during 4H-SiC solution growth},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2019},
volume={29},
number={6},
pages={294-297},
doi={10.6111/JKCGCT.2019.29.6.294}

TY - JOUR
AU - SHIN Yunji
AU - park tae yong
AU - Si-Young Bae
AU - Seongmin Jeong
TI - The effect of rotation on the macro-steps formation during 4H-SiC solution growth
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2019
VL - 29
IS - 6
PB - The Korea Association Of Crystal Growth, Inc.
SP - 294
EP - 297
SN - 1225-1429
AB - New insights about macro-step formation has been investigated. The phenomena of surface instability caused bythe interaction between step flow and fluid flow was describe in mechanical way. The rotation of the seed crystal in aclockwise direction was applied with a speed varied from 30 to 200 rpm during the TSSG process on the Si- and C-faces4H-SiC. The macro-steps were formed along the two specific directions at different locations on the crystal for each, i.e.,[10-10] or [01-10] directions or both. From the results, it is suggested that the macro-steps were generated from the microstepsby interaction between step flow and fluid flow during the rotation of seed crystal. Furthermore, The fluid flow couldbe effective to control the micro- and/or macro-step behavior during solution growth.
KW - SiC;Solution growth;Surface instability;Macro-steps;Fluid dynamics
DO - 10.6111/JKCGCT.2019.29.6.294
ER -

SHIN Yunji, park tae yong, Si-Young Bae and Seongmin Jeong. (2019). The effect of rotation on the macro-steps formation during 4H-SiC solution growth. Journal of the Korean Crystal Growth and Crystal Technology, 29(6), 294-297.

SHIN Yunji, park tae yong, Si-Young Bae and Seongmin Jeong. 2019, "The effect of rotation on the macro-steps formation during 4H-SiC solution growth", Journal of the Korean Crystal Growth and Crystal Technology, vol.29, no.6 pp.294-297. Available from: doi:10.6111/JKCGCT.2019.29.6.294

SHIN Yunji, park tae yong, Si-Young Bae, Seongmin Jeong "The effect of rotation on the macro-steps formation during 4H-SiC solution growth" Journal of the Korean Crystal Growth and Crystal Technology 29.6 pp.294-297 (2019) : 294.

SHIN Yunji, park tae yong, Si-Young Bae, Seongmin Jeong. The effect of rotation on the macro-steps formation during 4H-SiC solution growth. 2019; 29(6), 294-297. Available from: doi:10.6111/JKCGCT.2019.29.6.294

SHIN Yunji, park tae yong, Si-Young Bae and Seongmin Jeong. "The effect of rotation on the macro-steps formation during 4H-SiC solution growth" Journal of the Korean Crystal Growth and Crystal Technology 29, no.6 (2019) : 294-297.doi: 10.6111/JKCGCT.2019.29.6.294

SHIN Yunji; park tae yong; Si-Young Bae; Seongmin Jeong. The effect of rotation on the macro-steps formation during 4H-SiC solution growth. Journal of the Korean Crystal Growth and Crystal Technology, 29(6), 294-297. doi: 10.6111/JKCGCT.2019.29.6.294

SHIN Yunji; park tae yong; Si-Young Bae; Seongmin Jeong. The effect of rotation on the macro-steps formation during 4H-SiC solution growth. Journal of the Korean Crystal Growth and Crystal Technology. 2019; 29(6) 294-297. doi: 10.6111/JKCGCT.2019.29.6.294

SHIN Yunji, park tae yong, Si-Young Bae, Seongmin Jeong. The effect of rotation on the macro-steps formation during 4H-SiC solution growth. 2019; 29(6), 294-297. Available from: doi:10.6111/JKCGCT.2019.29.6.294

SHIN Yunji, park tae yong, Si-Young Bae and Seongmin Jeong. "The effect of rotation on the macro-steps formation during 4H-SiC solution growth" Journal of the Korean Crystal Growth and Crystal Technology 29, no.6 (2019) : 294-297.doi: 10.6111/JKCGCT.2019.29.6.294