Effect of composition on the structural and thermal properties of TiZrN thin film (TiZrN 박막의 조성이 구조적 특성 및 열적 특성에 미치는 영향)

Choi ByoungSu (최병수); UM JI HUN (엄지훈); Min Jun Seok (석민준); BYEONG WOO LEE (이병우); Jin-Kon Kim (김진곤); Cho, Hyun (조현)

doi:10.6111/JKCGCT.2021.31.1.037

Effect of composition on the structural and thermal properties of TiZrN thin film

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2021, 31(1), pp.37-42
DOI : 10.6111/JKCGCT.2021.31.1.037
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Engineering > Materials Science and Engineering
Received : January 15, 2021
Accepted : February 3, 2021
Published : February 28, 2021

Choi ByoungSu ¹, UM JI HUN ¹, Min Jun Seok ¹, BYEONG WOO LEE ², Jin-Kon Kim ¹, Cho, Hyun ¹

¹부산대학교
²한국해양대학교

Accredited

ABSTRACT

The effect of chemical composition on the structural and thermal properties of TiZrN thin films was studied. As the Zr fraction in the deposited TixZr1-xN (x = 0.87, 0.82, 0.7, 0.6, and 0.28) increased, microstructural changes consisted of reduction in the grain size and a gradual transition from columnar structure to granular structure were observed. In addition,it was also confirmed that a gradual crystal phase transition from TiN to TiZrN has occurred as the Zr fraction increased up to 0.4. After heat treatment a t 900°C, Ti0.82Zr0.18N and Ti0.7Zr0.3N layers were converted to a form in which rutile phase TiO2 and TiZrO4 oxides coexist, while Ti0.6Zr0.4N layer was converted to TiZrO4 oxide. Among the five compositions of TiZrN films, the Ti0.6Zr0.4N showed the best high temperature stability and produced a significant enhancement in the thermal oxidation resistance of Inconel 617 through suppressing the surface diffusion of Cr caused by thermal oxidation of the Inconel 617 substrate.

KEYWORDS

TiZrN film, rf magnetron sputtering, Film composition, Structural properties, Thermal properties

Citation status

* References for papers published after 2023 are currently being built.

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Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

Effect of composition on the structural and thermal properties of TiZrN thin film

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* References for papers published after 2023 are currently being built.

Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

Effect of composition on the structural and thermal properties of TiZrN thin film

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