Solid-state synthesis of yttrium oxyfluoride powders and their application to plasma spray coating (옥시불화이트륨 분말의 고상합성 및 플라즈마 스프레이 코팅 적용)

Jung-Il Lee (이정일); Young-Ju Kim (김영주); Chae Hui Ra (채희라); yun jeong kim (김윤정); PARKSEONHJU (박성주); sin gyoung seon (신경선); Ha TaeBin (하태빈); Ji Hyeon Kim (김지현); Gu Hun Jeong (정구훈); Jeong-ho Ryu (류정호)

doi:10.6111/JKCGCT.2021.31.6.276

Solid-state synthesis of yttrium oxyfluoride powders and their application to plasma spray coating

Journal of the Korean Crystal Growth and Crystal Technology
Abbr : J. Korean Cryst. Growth Cryst. Technol.
2021, 31(6), pp.276-281
DOI : 10.6111/JKCGCT.2021.31.6.276
Publisher : The Korea Association Of Crystal Growth, Inc.
Research Area : Engineering > Materials Science and Engineering
Received : November 15, 2021
Accepted : November 30, 2021
Published : December 31, 2021

Jung-Il Lee ¹, Young-Ju Kim ², Chae Hui Ra ¹, yun jeong kim ¹, PARKSEONHJU ¹, sin gyoung seon ¹, Ha TaeBin ¹, Ji Hyeon Kim ¹, Gu Hun Jeong ¹, Jeong-ho Ryu ¹

¹한국교통대학교
²(주)대찬테크

Accredited

ABSTRACT

In order to manufacture a semiconductor circuit, etching, cleaning, and deposition processes are repeated. During these processes, the inside of the processing chamber is exposed to corrosive plasma. Therefore, the coating of the innerwall of the semiconductor equipment with a plasma-resistant material has been attempted to minimize the etching of the coating and particle contaminant generation. In this study, we synthesized yttrium oxyfluoride (YOF) powder by a solidstate reaction using Y2O3 and YF3 as raw materials. Mixing ratio of the Y2O3 and YF3 was varied from 1.0:1.0 to 1.0:1.6. Effects of the mixing ratio on crystal structure and microstructure of the synthesized YOF powder were investigated using XRD and FE-SEM. The synthesized YOF powder was successfully applied to plasma spray coating process on Al substrate.

KEYWORDS

Yttrium oxyfluoride, YOF, Solid-state reaction, Plasma spray coating

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This paper was written with support from the National Research Foundation of Korea.

KJCKorea
Journal Central

Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

Solid-state synthesis of yttrium oxyfluoride powders and their application to plasma spray coating

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* References for papers published after 2023 are currently being built.

Journal of the Korean Crystal Growth and Crystal Technology 2023 KCI Impact Factor : 0.19

Solid-state synthesis of yttrium oxyfluoride powders and their application to plasma spray coating

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