@article{ART003152908},
author={Won-Bae Sohn and Jeon Su Jong and KangJuneHyuk and Doo Gun Kim and Jin Hyeok Kim and Seon Hoon Kim},
title={Study of wavelength-dependent birefringence in CaF₂ single crystals},
journal={Journal of the Korean Crystal Growth and Crystal Technology},
issn={1225-1429},
year={2024},
volume={34},
number={6},
pages={195-201},
doi={10.6111/JKCGCT.2024.34.6.195}
TY - JOUR
AU - Won-Bae Sohn
AU - Jeon Su Jong
AU - KangJuneHyuk
AU - Doo Gun Kim
AU - Jin Hyeok Kim
AU - Seon Hoon Kim
TI - Study of wavelength-dependent birefringence in CaF₂ single crystals
JO - Journal of the Korean Crystal Growth and Crystal Technology
PY - 2024
VL - 34
IS - 6
PB - The Korea Association Of Crystal Growth, Inc.
SP - 195
EP - 201
SN - 1225-1429
AB - CaF2 (calcium fluoride) single crystal is in increasing demand as an objective lens for semiconductor lithography equipment with deep ultraviolet (DUV) light source. High crystallinity, excellent and homogeneous optical properties, and low birefringence value are required to be used as a material for UV lens. In this study, <111> CaF2 single crystals were grown via czochralski growing method. Growth direction, single crystallinity, high purity and high optical transmittance of CaF2 crystal were confirmed. In addition, the crystal shows average refractive index of 1.437124, 1.433864, and 1.43248 according to 486.1 nm, 587.6 nm, and 656.3 nm wavelengths, respectively. Calculated uniformity of refractive index was 17.4 ppm, 10.5 ppm, and 10.5 ppm, which shows excellent optical homogeneity. Moreover, residual stress was analyzed through comparing birefringence at 193 nm and 570 nm wavelength. CaF2 single crystal shows average birefringence of 1.021 nm/cm under 193 nm light source, while 0.788 nm/cm at 570 nm source. Considerable changes of birefringence pattern according to light source wavelength were not observed. Conclusively, we confirmed that our as-grown CaF2 single crystal has remarkable optical and structural properties such as uniform refractive index and low birefringence.
KW - CaF2;Single crystal;DUV lens;Birefringence;Refractive index
DO - 10.6111/JKCGCT.2024.34.6.195
ER -
Won-Bae Sohn, Jeon Su Jong, KangJuneHyuk, Doo Gun Kim, Jin Hyeok Kim and Seon Hoon Kim. (2024). Study of wavelength-dependent birefringence in CaF₂ single crystals. Journal of the Korean Crystal Growth and Crystal Technology, 34(6), 195-201.
Won-Bae Sohn, Jeon Su Jong, KangJuneHyuk, Doo Gun Kim, Jin Hyeok Kim and Seon Hoon Kim. 2024, "Study of wavelength-dependent birefringence in CaF₂ single crystals", Journal of the Korean Crystal Growth and Crystal Technology, vol.34, no.6 pp.195-201. Available from: doi:10.6111/JKCGCT.2024.34.6.195
Won-Bae Sohn, Jeon Su Jong, KangJuneHyuk, Doo Gun Kim, Jin Hyeok Kim, Seon Hoon Kim "Study of wavelength-dependent birefringence in CaF₂ single crystals" Journal of the Korean Crystal Growth and Crystal Technology 34.6 pp.195-201 (2024) : 195.
Won-Bae Sohn, Jeon Su Jong, KangJuneHyuk, Doo Gun Kim, Jin Hyeok Kim, Seon Hoon Kim. Study of wavelength-dependent birefringence in CaF₂ single crystals. 2024; 34(6), 195-201. Available from: doi:10.6111/JKCGCT.2024.34.6.195
Won-Bae Sohn, Jeon Su Jong, KangJuneHyuk, Doo Gun Kim, Jin Hyeok Kim and Seon Hoon Kim. "Study of wavelength-dependent birefringence in CaF₂ single crystals" Journal of the Korean Crystal Growth and Crystal Technology 34, no.6 (2024) : 195-201.doi: 10.6111/JKCGCT.2024.34.6.195
Won-Bae Sohn; Jeon Su Jong; KangJuneHyuk; Doo Gun Kim; Jin Hyeok Kim; Seon Hoon Kim. Study of wavelength-dependent birefringence in CaF₂ single crystals. Journal of the Korean Crystal Growth and Crystal Technology, 34(6), 195-201. doi: 10.6111/JKCGCT.2024.34.6.195
Won-Bae Sohn; Jeon Su Jong; KangJuneHyuk; Doo Gun Kim; Jin Hyeok Kim; Seon Hoon Kim. Study of wavelength-dependent birefringence in CaF₂ single crystals. Journal of the Korean Crystal Growth and Crystal Technology. 2024; 34(6) 195-201. doi: 10.6111/JKCGCT.2024.34.6.195
Won-Bae Sohn, Jeon Su Jong, KangJuneHyuk, Doo Gun Kim, Jin Hyeok Kim, Seon Hoon Kim. Study of wavelength-dependent birefringence in CaF₂ single crystals. 2024; 34(6), 195-201. Available from: doi:10.6111/JKCGCT.2024.34.6.195
Won-Bae Sohn, Jeon Su Jong, KangJuneHyuk, Doo Gun Kim, Jin Hyeok Kim and Seon Hoon Kim. "Study of wavelength-dependent birefringence in CaF₂ single crystals" Journal of the Korean Crystal Growth and Crystal Technology 34, no.6 (2024) : 195-201.doi: 10.6111/JKCGCT.2024.34.6.195
