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The development of the photoreflectance program for the analysis of semiconductor optical properties

  • Journal of The Korea Society of Computer and Information
  • Abbr : JKSCI
  • 2022, 27(8), pp.211-218
  • DOI : 10.9708/jksci.2022.27.08.211
  • Publisher : The Korean Society Of Computer And Information
  • Research Area : Engineering > Computer Science
  • Received : July 7, 2022
  • Accepted : August 17, 2022
  • Published : August 31, 2022

Shin Sang Hoon 1 Kim Geun-Hyeong 1

1경운대학교

Accredited

ABSTRACT

In this paper, a computer simulation program was developed to interpret the results measured by photoreflectance spectroscopy. The developed program is implemented so that the user can easily change the factors required for optical modulation characteristic interpretation, and the result of the value can be checked simultaneously with the actual measurement result. The results obtained by photoreflectance spectroscopy are obtained by mixing a third derivative function form (TDFF) modulated around a bandgap with a Franz-Keldysh oscillation (FKO) signal due to an electric field at a surface and an interface higher than the bandgap. Through the computer simulation program, the optical characteristics that appear in the GaSb Epi layer formed as a single layer were analyzed, and very useful results were obtained by specializing in optical modulation analysis. In addition, a Fast Fourier Transform (FFT) analysis tool was added to facilitate frequency characteristics analysis of FKO.

Citation status

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