@article{ART003349353},
author={Jae-Yung Song and Seung-min Oh},
title={PLC-based Closed-loop Control for Energy Optimization of Semiconductor Vacuum Pumps},
journal={Journal of The Korea Society of Computer and Information},
issn={1598-849X},
year={2026},
volume={31},
number={6},
pages={169-174}
TY - JOUR
AU - Jae-Yung Song
AU - Seung-min Oh
TI - PLC-based Closed-loop Control for Energy Optimization of Semiconductor Vacuum Pumps
JO - Journal of The Korea Society of Computer and Information
PY - 2026
VL - 31
IS - 6
PB - The Korean Society Of Computer And Information
SP - 169
EP - 174
SN - 1598-849X
AB - This paper proposes an active closed-loop control architecture based on a Programmable Logic Controller (PLC) to optimize the pumping capacity and energy efficiency of vacuum pumps in semiconductor manufacturing. While conventional vacuum systems in the industry often operate with fixed parameters regardless of real-time process loads, the proposed scheme utilizes a hierarchical control strategy to bridge the gap between energy saving and process stability. The core of the strategy involves a three-stage variable threshold control: a full exhaust mode for initial drawdown, a fine pressure control mode using a Throttle Valve (TV) PID when within 20% of the setpoint, and an energy optimization mode that incrementally reduces the Inverter (VFD) frequency by 5Hz when within a 3% error margin. By mapping control parameters directly to the PLC’s D-Device memory addresses, the system ensures instantaneous response times and minimal communication latency. Experimental results demonstrate that the proposed method achieves an energy reduction of approximately 38% compared to traditional fixed-frequency operations while maintaining pressure stability within ±1% of the target value. This research contributes to the semiconductor equipment industry by providing a practical solution for ESG management and cost reduction through intelligent utility control.
KW - PLC(Programmable Logic Controller);Closed-loop Feedback;Predictive Maintenance;Semiconductor Equipment;Energy Optimization;VFD
DO -
UR -
ER -
Jae-Yung Song and Seung-min Oh. (2026). PLC-based Closed-loop Control for Energy Optimization of Semiconductor Vacuum Pumps. Journal of The Korea Society of Computer and Information, 31(6), 169-174.
Jae-Yung Song and Seung-min Oh. 2026, "PLC-based Closed-loop Control for Energy Optimization of Semiconductor Vacuum Pumps", Journal of The Korea Society of Computer and Information, vol.31, no.6 pp.169-174.
Jae-Yung Song, Seung-min Oh "PLC-based Closed-loop Control for Energy Optimization of Semiconductor Vacuum Pumps" Journal of The Korea Society of Computer and Information 31.6 pp.169-174 (2026) : 169.
Jae-Yung Song, Seung-min Oh. PLC-based Closed-loop Control for Energy Optimization of Semiconductor Vacuum Pumps. 2026; 31(6), 169-174.
Jae-Yung Song and Seung-min Oh. "PLC-based Closed-loop Control for Energy Optimization of Semiconductor Vacuum Pumps" Journal of The Korea Society of Computer and Information 31, no.6 (2026) : 169-174.
Jae-Yung Song; Seung-min Oh. PLC-based Closed-loop Control for Energy Optimization of Semiconductor Vacuum Pumps. Journal of The Korea Society of Computer and Information, 31(6), 169-174.
Jae-Yung Song; Seung-min Oh. PLC-based Closed-loop Control for Energy Optimization of Semiconductor Vacuum Pumps. Journal of The Korea Society of Computer and Information. 2026; 31(6) 169-174.
Jae-Yung Song, Seung-min Oh. PLC-based Closed-loop Control for Energy Optimization of Semiconductor Vacuum Pumps. 2026; 31(6), 169-174.
Jae-Yung Song and Seung-min Oh. "PLC-based Closed-loop Control for Energy Optimization of Semiconductor Vacuum Pumps" Journal of The Korea Society of Computer and Information 31, no.6 (2026) : 169-174.
