@article{ART001631788},
author={Hongkyw Choi and Kim, Jong Yun and Hu Young Jeong and Choon-Gi Choi and 최성율},
title={Characterization of chemical vapor deposition-grown graphene films with various etchants},
journal={Carbon Letters},
issn={1976-4251},
year={2012},
volume={13},
number={1},
pages={44-47}
TY - JOUR
AU - Hongkyw Choi
AU - Kim, Jong Yun
AU - Hu Young Jeong
AU - Choon-Gi Choi
AU - 최성율
TI - Characterization of chemical vapor deposition-grown graphene films with various etchants
JO - Carbon Letters
PY - 2012
VL - 13
IS - 1
PB - Korean Carbon Society
SP - 44
EP - 47
SN - 1976-4251
AB - We analyzed the effect of etchants for metal catalysts in terms of the characteristics of resulting graphene films, such as sheet resistance, hall mobility, transmittance, and carrier concentration. We found the residue of FeCl_3 etchant degraded the sheet resistance and mobility of graphene films. The residue was identified as an iron oxide containing a small amount of Cl through elemental analysis using X-ray photoelectron spectroscopy. To remove this residue, we provide an alternative etching solution by introducing acidic etching solutions and their combinations (HNO_3, HCl, FeCl_3 + HCl, and FeCl_3 + HNO_3). The combination of FeCl_3 and acidic solutions (HCl and HNO_3) resulted in more enhanced electrical properties than pure etchants, which is attributed to the elimination of left over etching residue, and a small amount of amorphous carbon debris after the etching process.
KW - graphene;chemical vapor deposition;etchant;raman spectroscopy;transmittence;X-ray photoelectron spectroscopy;hall measurement
DO -
UR -
ER -
Hongkyw Choi, Kim, Jong Yun, Hu Young Jeong, Choon-Gi Choi and 최성율. (2012). Characterization of chemical vapor deposition-grown graphene films with various etchants. Carbon Letters, 13(1), 44-47.
Hongkyw Choi, Kim, Jong Yun, Hu Young Jeong, Choon-Gi Choi and 최성율. 2012, "Characterization of chemical vapor deposition-grown graphene films with various etchants", Carbon Letters, vol.13, no.1 pp.44-47.
Hongkyw Choi, Kim, Jong Yun, Hu Young Jeong, Choon-Gi Choi, 최성율 "Characterization of chemical vapor deposition-grown graphene films with various etchants" Carbon Letters 13.1 pp.44-47 (2012) : 44.
Hongkyw Choi, Kim, Jong Yun, Hu Young Jeong, Choon-Gi Choi, 최성율. Characterization of chemical vapor deposition-grown graphene films with various etchants. 2012; 13(1), 44-47.
Hongkyw Choi, Kim, Jong Yun, Hu Young Jeong, Choon-Gi Choi and 최성율. "Characterization of chemical vapor deposition-grown graphene films with various etchants" Carbon Letters 13, no.1 (2012) : 44-47.
Hongkyw Choi; Kim, Jong Yun; Hu Young Jeong; Choon-Gi Choi; 최성율. Characterization of chemical vapor deposition-grown graphene films with various etchants. Carbon Letters, 13(1), 44-47.
Hongkyw Choi; Kim, Jong Yun; Hu Young Jeong; Choon-Gi Choi; 최성율. Characterization of chemical vapor deposition-grown graphene films with various etchants. Carbon Letters. 2012; 13(1) 44-47.
Hongkyw Choi, Kim, Jong Yun, Hu Young Jeong, Choon-Gi Choi, 최성율. Characterization of chemical vapor deposition-grown graphene films with various etchants. 2012; 13(1), 44-47.
Hongkyw Choi, Kim, Jong Yun, Hu Young Jeong, Choon-Gi Choi and 최성율. "Characterization of chemical vapor deposition-grown graphene films with various etchants" Carbon Letters 13, no.1 (2012) : 44-47.
