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@article{ART002278247},
author={남희균 and jin-mook jung and Hwang In-Tae and Shin， Junhwa and 정창희 and Choi, Jae-Hak},
title={Preparation of photoresist-derived carbon micropatterns by proton ion beam lithography and pyrolysis},
journal={Carbon Letters},
issn={1976-4251},
year={2017},
volume={24},
number={1},
pages={55-61}

TY - JOUR
AU - 남희균
AU - jin-mook jung
AU - Hwang In-Tae
AU - Shin， Junhwa
AU - 정창희
AU - Choi, Jae-Hak
TI - Preparation of photoresist-derived carbon micropatterns by proton ion beam lithography and pyrolysis
JO - Carbon Letters
PY - 2017
VL - 24
IS - 1
PB - Korean Carbon Society
SP - 55
EP - 61
SN - 1976-4251
AB - Carbon micropatterns (CMs) were fabricated from a negative-type SU-8 photoresist by proton ion beam lithography and pyrolysis. Well-defined negative-type SU-8 micropatterns were formed by proton ion beam lithography at the optimized fluence of 1×1015 ions cm–2 and then pyrolyzed to form CMs. The crosslinked network structures formed by proton irradiation were converted to pseudo-graphitic structures by pyrolysis. The fabricated CMs showed a good electrical conductivity of 1.58×102 S cm–1 and a very low surface roughness.
KW - carbon micropatterns;SU-8 photoresist;proton ion beam lithography;pyrolysis
DO -
UR -
ER -

남희균, jin-mook jung, Hwang In-Tae, Shin， Junhwa, 정창희 and Choi, Jae-Hak. (2017). Preparation of photoresist-derived carbon micropatterns by proton ion beam lithography and pyrolysis. Carbon Letters, 24(1), 55-61.

남희균, jin-mook jung, Hwang In-Tae, Shin， Junhwa, 정창희 and Choi, Jae-Hak. 2017, "Preparation of photoresist-derived carbon micropatterns by proton ion beam lithography and pyrolysis", Carbon Letters, vol.24, no.1 pp.55-61.

남희균, jin-mook jung, Hwang In-Tae, Shin， Junhwa, 정창희, Choi, Jae-Hak "Preparation of photoresist-derived carbon micropatterns by proton ion beam lithography and pyrolysis" Carbon Letters 24.1 pp.55-61 (2017) : 55.

남희균, jin-mook jung, Hwang In-Tae, Shin， Junhwa, 정창희, Choi, Jae-Hak. Preparation of photoresist-derived carbon micropatterns by proton ion beam lithography and pyrolysis. 2017; 24(1), 55-61.

남희균, jin-mook jung, Hwang In-Tae, Shin， Junhwa, 정창희 and Choi, Jae-Hak. "Preparation of photoresist-derived carbon micropatterns by proton ion beam lithography and pyrolysis" Carbon Letters 24, no.1 (2017) : 55-61.

남희균; jin-mook jung; Hwang In-Tae; Shin， Junhwa; 정창희; Choi, Jae-Hak. Preparation of photoresist-derived carbon micropatterns by proton ion beam lithography and pyrolysis. Carbon Letters, 24(1), 55-61.

남희균; jin-mook jung; Hwang In-Tae; Shin， Junhwa; 정창희; Choi, Jae-Hak. Preparation of photoresist-derived carbon micropatterns by proton ion beam lithography and pyrolysis. Carbon Letters. 2017; 24(1) 55-61.

남희균, jin-mook jung, Hwang In-Tae, Shin， Junhwa, 정창희, Choi, Jae-Hak. Preparation of photoresist-derived carbon micropatterns by proton ion beam lithography and pyrolysis. 2017; 24(1), 55-61.

남희균, jin-mook jung, Hwang In-Tae, Shin， Junhwa, 정창희 and Choi, Jae-Hak. "Preparation of photoresist-derived carbon micropatterns by proton ion beam lithography and pyrolysis" Carbon Letters 24, no.1 (2017) : 55-61.