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Crystallization of amorphous silicon films below 450oC by FALC

  • Journal of the Korean Crystal Growth and Crystal Technology
  • Abbr : J. Korean Cryst. Growth Cryst. Technol.
  • 2002, 12(4), pp.210-214
  • Publisher : The Korea Association Of Crystal Growth, Inc.
  • Research Area : Engineering > Materials Science and Engineering

Kyoung-WanPark 1 Jeong-EunYou 1 Duck-KyunChoi 1

1Hanyang University

Accredited

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