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Heteroepitaxial growth of 3C-SiC on 6H-SiC substrates by thermal chemical vapor deposition

  • Journal of the Korean Crystal Growth and Crystal Technology
  • Abbr : J. Korean Cryst. Growth Cryst. Technol.
  • 2003, 13(6), pp.290-296
  • Publisher : The Korea Association Of Crystal Growth, Inc.
  • Research Area : Engineering > Materials Science and Engineering

Seong-JooJang 1 Ju-HoonPark 1

1Dongshin University

Accredited

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